Strasbaugh nTellect 7AF - Page 2195

Atmospheric Pre-aligner Manual
4000-0015 Rev 1
vi
Loading Position .......................................................................................................32
Chuck Position ..........................................................................................................33
Unloading or Up Position..........................................................................................33
Using the Fast Align Option..........................................................................................34
Maintenance and Diagnostics .........................................................................................35
Maintenance ..................................................................................................................35
Running Diagnostic Tests .............................................................................................36
Starting Diagnostics ..................................................................................................37
NVSRAM Test..........................................................................................................38
Galil & I/O Test.........................................................................................................38
Encoder Read Test ....................................................................................................40
Limit & Home Test ...................................................................................................40
Servo Test..................................................................................................................41
Home Test and Set ....................................................................................................43
r & z Home Offset.....................................................................................................44
Scaling Factor Test....................................................................................................46
Vacuum Valve Sensor...............................................................................................47
Pre-aligner I/Os (for Integrated Systems only)..........................................................49
CCD and Chuck Test.................................................................................................49
Troubleshooting ...............................................................................................................51
Checking Pre-aligner Status..........................................................................................52
Cause and Recovery for STAT Messages.................................................................53
Checking Alignment Status with the ALST Command............................................54
Checking Limit Switch Status with the RLS Command...........................................55
Using the GLST Command.......................................................................................57
Glossary of Acronyms, Abbreviations, and Terms..........................................................59