Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
39
5. Slightly extend the robot arm. Place the bubble level on the lower arm
link centered over the Z column.
6. Adjust the three jackscrews on the baseplate with the 1/8 Allen wrench
until the bubble indicates level.
7. Rotate theta 180° and check the bubble level again.
8. Tighten the three bolts securing the robot to the tool using the 3/16
Allen wrench.
9. Mount and level the end effector.
10. To re-check the level, loosen the four socket head cap screws on the
end of the end effector. Adjust the three set screws to level. Tighten
the four socket head cap screws.
11.
Level all other stations to make sure the end effector, cassette
platforms, and stations are level. That is, the end effector must be
parallel to the wafers at each station.
Bubble Level
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