Vacuum Robot Manual
4000-0315 Rev 1
29
4. Gently lower the Z-axis until the wafer is just touching the edges of
the slot.
5. Select Station A. Press Enter or Teach to save (teach) Station A. For
stroke and offset parameters, you can use the defaults or try 75 and 40.
These parameters are saved in the coordinate file with the station
location and can be adjusted later.
6. Teach Station B, using the method you used for Station A.
7. To teach Station C, the stage position:
• Place the wafer on the end effector.
• Servo off R and T.
• Without pushing the outer link, manually adjust the robot arm to
the stage while raising or lowering the Z axis.
• Adjust the R axis until the wafer is above the stage. Lower the Z
axis until the wafer is just resting on the stage.
• Save the position, stroke, and offset for Station C.
8. Test the station coordinates by sending several GET and PUT
instructions:
• Manually place a wafer on Station C.
• Get the wafer from Station C.
• Put the wafer in slot 1 of Station A.
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