Vacuum Robot Manual
4000-0315 Rev 1
31
• You are prompted to select from t, r, and z. For Indexer A, the
first indexer, select r.
• Use the radial or theta jogging keys to move the Indexer until the
first slot of the cassette is midway between the slot valve facets.
This point is the Wafer Transport Plane (WTP).
• Press Enter to save the current Indexer vertical value to CSI # 15.
• Repeat for Indexer B. (To select Indexer B, the second indexer,
select z.)
5. To verify that the INX macro moves the Indexers to WTP, enter the
command:
INX A, 1
This positions the cassette in Indexer A to slot 1, the value stored in
Coordinate Special Item #15 (WTP).
Repeat for Indexer B:
INX B, 1.
6. In this step, use EQT or a Teach Pendant to level the Indexer platforms
and teach the robot the indexer station. For more details on
positioning the robot end effector and teaching the station, refer to the
previous teaching section.
• Place a cassette containing a wafer in slot one on Indexer A.
• Position the robot end effector directly below the wafer in slot one.
• Adjust the platform indexer leveling screws so that the wafer is
parallel to the robot end effector.
• Enter RSA to restore the operational speed and acceleration.
• Teach the robot to Station A. Enter SAV in Terminal mode.
• Repeat this step for Indexer B.
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