Strasbaugh Table of Contents
Version 4.0 - February 1998 iii
Table of Contents
Chapter 1 Introduction 1-1
WHAT’S NEW.... 3
Flat Panel Display Operator Interface 3
Version 4.25 of the 6DS-SP Software 3
Revised, Updated Engineering Drawings 4
6DS-SP User Interface Reference Document Addition 4
ABOUT THE 6DS-SP MANUALS 5
Operations Manual - Contents and Purpose 5
Maintenance Manual - Contents and Purpose 5
Document Conventions 6
At the Keyboard 6
At the Control Panel 7
Step-By-Step Instructions 7
ABOUT THE MODEL 6DS-SP PLANARIZER 8
A Basic Machine with Optional Features 8
Mechanical Components 9
Electrical Distribution and Control 10
SAFETY 11
General Operation 11
Visual Hazard Alerts 13
Hazard Magnitude Levels 13
Three-Panel Alert Graphics 13
Interlocks - Safety Interlock Door Switches 17
Sprayer Use 18
Slurry Compounds 18
Waste Disposal 18
Lockout Safety Procedure 19
Lockout Procedure 20
Training, Lockout/Tagout, Per 29 Cfr 1910.147 22
Material Safety Data Sheets for Products Used in Machine
Maintenance 24
GUARANTEE/WARRANTY CERTIFICATE 25
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