Operations Model 6DS-SP Planarizer
iv Version 4.0 - February 1998
Chapter 2 Machine Description 2-1
OVERVIEW 4
CABINETRY 5
Interlock Safety Switches 5
Service Door Interlocks 5
Operator Door Interlocks 6
PLANARIZER SUBASSEMBLIES 13
CONTROL PANEL AND EMERGENCY OFF BUTTONS 16
Control Panel 16
Additional Emergency Off Buttons 18
CONTROL COMPUTER 19
Where to Find More Information on the Software... 19
Where to Find More Information on the Control Computer
System... 19
Monitors and Keyboards 19
Keyboards 20
Menus 21
MECHANICAL DESCRIPTION 24
Bridge Drive Assembly 24
Elevator Assembly 25
Robot Assembly 27
Left/Right Load/Unload Stations 28
Left/Right Carrier/Wafer Cleaning Stations 28
Shuttle Assembly 29
Polish Table Drive Assembly 29
Spindle Drive Assembly 30
Spindle Down Force Assembly 32
Conditioning Arm Down Force Assembly 33
FACILITIES CONNECTIONS 34
Confirming That Utility Sources Meet Requirements 34
General Facilities and Electrical Service Data Sheet 35
Connecting Utilities 36
Electrical 37
Compressed Air 39
Vacuum and D.I. Water 39
Vacuum System 39
Vacuum Separator 40
Exhaust 40
Temperature-Controlled Water 40
Temperature Control Unit 40
Drains 41
Slurry System Connection 42
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