Operations Model 6DS-SP Planarizer
2 - 34 Version 4.0 - February 1998
FACILITIES CONNECTIONS
The section below describes the utility sources required for 6DS-SP
operation and procedures for making utility and slurry connections to the
machine.
CONFIRMING THAT UTILITY SOURCES
MEET REQUIREMENTS
IMPORTANT: The necessary utilities must meet the required
specifications (shown below) in order for the Model
6DS-SP Planarizer to operate correctly.
The following list identifies the minimum facilities requirements for the
machine:
• Electrical: 208 VAC, THREE-PHASE
60 Hz, 60 FLA
• Clean Dry Air: 100 PSI, 10 SCFM
• Vacuum: 20 in. Hg
• D.I. Water: 30 PSI minimum
45 PSI maximum
(Note that teflon D.I. water
plumbing is now standard on all
machines.)
• Acid Drain: 1-1/2-in. pipe
• Industrial Waste Drain:1-1/2-in. pipe
• Exhaust: 6-in. duct, 250 SCFM
• Bulk Slurry: 20 PSI maximum
• Nitrogen:
(NOVA option only)
10 PSI
3/8-in. polyflux (polyethylene)
tubing
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