Strasbaugh Table of Contents
Version 4.0 - February 1998 v
AUTO POLISH CYCLE OPERATION - THE SEQUENCE OF
EVENTS 44
A. Cassette Loading 44
B. Wafer Loading Sequence 45
C. Polish Cycle Sequence 46
D. Wafer Unloading Sequence 47
E. Cassette Removal 48
F. Cycle Halt 48
Chapter 3 Operator Functions 3-1
OVERVIEW 3
Messages Displayed on the Control Computer Screen
Take Precedence! 3
Assumptions 3
INTRODUCTION TO THE 6DS-SP SOFTWARE 4
Software Features 5
Menu Grouping and Recipe Definition 8
Menu Grouping 8
Recipe Definition 9
Calibration/Configuration Changes 10
User Interface Description 11
Screen Usage 12
Keypad and Keyboard Usage 15
User Input 17
Light Tower Support 19
Menu Selection 21
MENUS USED IN BASIC OPERATION 23
HOME MACHINE MENU 24
Function Key Choices Available at the Home Machine
Menu 26
AUTO POLISH CYCLE MENU 27
Function Key Choices Available at the Auto Polish Cycle
Menu 28
Additional Features 29
SLURRY FLUSH MENU 33
Menu Item Descriptions at the Slurry Flush Menu 34
Additional Feature 34
RECIPE MANAGEMENT MENU 35
Function Key Choices Available at the Recipe
Management Menu 37
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