Operations Model 6DS-SP Planarizer
2 - 44 Version 4.0 - February 1998
AUTO POLISH CYCLE
OPERATION - THE SEQUENCE
OF EVENTS
This chapter section provides a detailed narration of the sequence of
machine events comprising the auto polish cycle.
Assumptions - the events sequence (A. through F., below) was written with
the assumption that the machine has been
1. correctly installed and maintained, per procedures found in the
6DS-SP Maintenance manual.
2. correctly setup, per procedures in the Machine Setup chapter of the 6DS-
SP Operations manual for setup of auto polish cycle parameters,
machine setup parameters, pad and carrier conditioning parameters,
alarm parameters, slurry flush parameters, and program data storage.
3. powered up, homed, and prepared for an auto cycle, per procedures
found in the Operator Functions chapter of the 6DS-SP Operations
manual.
A. CASSETTE LOADING
The operator:
1. places a filled cassette on a send elevator.
2. lowers the elevator cassette sensor arm.
3. places an empty cassette on a receive elevator.
4. lowers the elevator cassette sensor arm.
5. closes the elevator door.
6. presses the <CYCLE START> pushbutton on the control panel.
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