Operations Model 6DS-SP Planarizer
2 - 4 Version 4.0 - February 1998
MACHINE DESCRIPTION
OVERVIEW
The chapter below provides an overview of the physical features, layout, and
function of the Model 6DS-SP Planarizer. The illustrations presented are not
to scale; their purpose is to offer a simplified view of the components of the
machine.
The Cabinetry section details outside views of the machine, including doors
and panels, location of standard emergency off buttons, and power switches.
The Planarizer Subassemblies section introduces the machine’s key
subassemblies. The Control Panel section deals with the functions of items
found on the control panel as well as additional “Emergency Off” buttons.
The Control Computer section provides information on the monitor, the two
keyboards available, and the menu display. The Mechanical Description
section describes the mechanical assemblies and components participating in
machine cycle functions. The Facilities Connection section lists the utility
sources required for 6DS-SP operation and procedures for making utility and
slurry connections to the machine. The Auto Polish Sequence section is a
detailed narration of the sequence of machine events comprising the auto
polish cycle.
Note: Portions of this chapter are repeated from the Installation,
Physical Description, and Mechanical Description chapters of
the Model 6DS-SP Maintenance manual.
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