Strasbaugh Machine Description
Version 4.0 - February 1998 2 - 3
FACILITIES CONNECTIONS 34
Confirming That Utility Sources Meet Requirements 34
General Facilities and Electrical Service Data Sheet 35
Connecting Utilities 36
Electrical 37
Compressed Air 39
Vacuum and D.I. Water 39
Vacuum System 39
Vacuum Separator 40
Exhaust 40
Temperature-Controlled Water 40
Temperature Control Unit 40
Drains 41
Slurry System Connection 42
AUTO POLISH CYCLE OPERATION - THE SEQUENCE OF EVENTS 44
A. Cassette Loading 44
B. Wafer Loading Sequence 45
C. Polish Cycle Sequence 46
D. Wafer Unloading Sequence 47
E. Cassette Removal 48
F. Cycle Halt 48
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