Operations Model 6DS-SP Planarizer
2 - 2 Version 4.0 - February 1998
OVERVIEW 4
Cabinetry 5
Interlock Safety Switches 5
Service Door Interlocks 5
Operator Door Interlocks 6
PLANARIZER SUBASSEMBLIES 13
CONTROL PANEL AND EMERGENCY OFF BUTTONS 16
Control Panel 16
Additional Emergency Off Buttons 18
CONTROL COMPUTER 19
Where to Find More Information on the Software... 19
Where to Find More Information on the Control Computer System... 19
Monitors and Keyboards 19
Keyboards 20
Menus 21
MECHANICAL DESCRIPTION 24
Bridge Drive Assembly 24
Elevator Assembly 25
Robot Assembly 27
Left/Right Load/Unload Stations 28
Left/Right Carrier/Wafer Cleaning Stations 28
Shuttle Assembly 29
Polish Table Drive Assembly 29
Spindle Drive Assembly 30
Spindle Down Force Assembly 32
Conditioning Arm Down Force Assembly 33
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