Strasbaugh 6DS-SP - Page 60

Strasbaugh Machine Description
Version 4.0 - February 1998 2 - 1
2
Machine Description
• OVERVIEW
• CABINETRY
• PLANARIZER SUBASSEMBLIES
• CONTROL PANEL AND EMERGENCY
OFF BUTTONS
• CONTROL COMPUTER
• MECHANICAL DESCRIPTION
• FACILITIES CONNECTIONS
• AUTO POLISH CYCLE OPERATION -
THE SEQUENCE OF EVENTS