Operations Model 6DS-SP Planarizer
4 - 8 Version 4.0 - February 1998
Menu Item Descriptions at the Slurry Flush Menu
Item(s) Function(s)
Slurry System Slurry 1
Slurry 2
Both
Sets the Slurry 1 system to be
flushed.
Sets the Slurry 2 system to be
flushed.
Sets both the Slurry 1 and 2
systems to be flushed.
Flow Rate
Sets the flow rate for the DI water that will flush
the selected slurry system(s).
Flush Time
Sets the duration of the slurry flush.
Additional Feature
WET IDLE SLURRY FLUSH:
A wet idle slurry flush can be enabled/disabled in the Machine Parameters
Menu.
If enabled, one slurry flush cycle will occur when wet idling begins. The wet
idle slurry flush will use the choices made at the Slurry Flush Menu.
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