Operations Model 6DS-SP Planarizer
4 - 46 Version 4.0 - February 1998
ADDITIONAL FEATURES AT THE ALARM PARAMETERS MENU
SLURRY ALARM ACTION CHOICE:
Calibration variable 59 "Slry alrm action (0-no, l-yes)" permits assignment
of certain action to the presence of an alarm indicating low or absent slurry.
If set to "0", slurry alarms will display as information only.
If set to " 1 ", cycle starting will be inhibited if any polish step requires a
slurry that has an alarm. If already in an auto cycle, a "finish cycle" will be
automatically set if such an alarm occurs. Finally, if not in a cycle the alarm
will still display as information only.
To Next Page
Loading...
