Operations Model 6DS-SP Planarizer
5 - 6 Version 4.0 - February 1998
TROUBLESHOOTING
OVERVIEW
This chapter details common problems, their solutions, and suggested
responsibility for resolution.
The problems listed below are organized by the order in which the user is
most likely to encounter them, beginning with problems encountered in
powering up the machine and moving through running an auto polish cycle.
Error messages/indicators are listed numerically.
Suggestions for problem resolution are presented in the order in which they
should be performed.
Note: For information on the Diagnostics, Manual Control, and
Calibration/Configuration menus, refer to the Software
Calibration chapter of the 6DS-SP Maintenance manual.
Problem Prevention
The most effective means of preventing problems is careful adherence to all
preventive maintenance schedules listed in the Preventive Maintenance
chapter of the 6DS-SP Maintenance manual and the Operator Functions
chapter of the 6DS-SP Operations manual.
Messages Displayed on the Control Computer Screen Take Precedence!
Messages and information displayed on the control computer screen always
take precedence over information in this manual.
Because control computer software can be updated more rapidly than manual
information, onscreen directions may be more current than the contents of
this manual. Should the manual and the screen information conflict,
always follow the onscreen directions.
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