Operations Model 6DS-SP Planarizer
5 - 8 Version 4.0 - February 1998
ALARM LOG MENU
The Alarm (Error) Log Menu logs the most recent 32 alarms which might
indicate machine trouble. All alarms displayed on the screen are logged.
The alarm log is intended for use as a troubleshooting aid. (It is not a
machine history log.) If the machine is having a problem, this log may
contain information that will help identify the source of the problem.
The alarm log should be reviewed analytically to accurately determine the
alarm sources. For example, alarms might be caused by a service problem,
such as low air pressure, rather than any machine fault. (A "Spindles not
arriving up" alarm may occur if the wafers are not separating from the table
surface in a reasonable amount of time.)
Alarms at cycle start will display "(at start)" after the alarm entry.
The alarm log is maintained on disk and will be saved if the machine is
turned off.
The alarm log cannot be cleared.
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