Maintenance Model 6DS-SP Planarizer
xiv Version 4.0 - February 1998
“ROBOT ARM NOT ARRIVING AT LEFT LOAD” - # 182 64
“ROBOT ARM NOT ARRIVING AT RIGHT LOAD” - # 183 64
“ROBOT UP/DN NOT ARRIVING AT TOP” - # 184 64
“ROBOT UP/DN NOT ARRIVING AT MIDDLE” - # 185 64
“ROBOT UP/DN NOT ARRIVING AT BOTTOM” - # 186 64
“ROBOT UP/DN NOT ARRIVING AT ABOVE LOAD” - # 187 64
“ROBOT UP/DN NOT ARRIVING AT LEFT LOAD” - # 188 64
“ROBOT UP/DN NOT ARRIVING AT RIGHT LOAD” - # 189 64
“BRIDGE NOT ARRIVING AT LEFT CURTAIN - # 190 65
“BRIDGE NOT ARRIVING AT RIGHT CURTAIN - # 191 65
“COND ARM NOT ARRIVING AT PARK” - # 194 65
“COND ARM NOT ARRIVING AT INNER” - # 195 65
“COND ARM NOT ARRIVING AT OUTER” - # 196 65
“WAFER NOT SEATING AT LEFT LOAD” - # 197 66
“WAFER NOT SEATING AT RIGHT LOAD” - # 198 66
“POLISH SECTION OPERATOR DOOR OPEN” - #199 67
“ELEVATOR SECTION OPERATOR DOOR OPEN” - # 200 67
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