Maintenance Model 6DS-SP Planarizer
1 - 12 U Version 4.0 - February 1998; Update 10/19/01
SAFETY
The 6DS-SP Planarizer has been designed for safe operation. However,
caution should be exercised while operating this machine. Failure to
adhere to the following safety instructions and to good safety practices
may result in injury to personnel or damage to the machine.
It is the responsibility of the user to be sure that the machine is in safe
operating condition at all times. The user is also responsible for
insuring that the operator follows all proper and safe operating
procedures. The following is a list of safety instructions:
GENERAL OPERATION
• Operating the machine with loose wafers inside is harmful to the
machine and wafers - Follow the procedures in the
Troubleshooting chapter of this manual for removing loose or
broken wafers.
• DO NOT at any time put hands or objects beyond the Operator
Doors while the polish table is in motion.
• Keep all guards and covers in place and in good repair.
• DO NOT bypass safety interlocks.
• Keep all control and electrical cabinet doors closed and latched.
• Disconnect power when servicing or repairing the machine.
• DO NOT operate the machine without proper electrical grounding.
• DO NOT wear loose clothing that could be caught by machine parts
in motion.
• Wear SAFETY GLASSES whenever working near moving
machinery.
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