Strasbaugh Introduction
Version 4.0 - February 1998; Update 10/19/01 1 - 21
For machines with the Mobile Remote Unit option (SA 219187), the
following CAUTIONS apply:
CAUTION
During the temporary thirty-second bypass of the Mobile
Remote E.M.O. circuit, the Mobile Remote Unit E.M.O. button
WILL NOT BE OPERABLE! However, all other machine
E.M.O. buttons WILL remain operable.
CAUTION
Do not override safety interlocks. All procedures in the 6DS-
SP Maintenance and Operations manuals are written to be
performed with the door interlocks closed while the machine
is in motion.
Opening a service door
at any time shuts power down to the entire
machine, including the control computer.
Opening one of the polish area operator doors
(sliding or bi-fold doors)
are opened, the safety controller monitoring that area must be reset
before motion can occur. Opening a polish area operator door during
an auto cycle also interrupts and suspends the cycle. A push button on
the operator interface panel labeled "RESET" resets the safety
controller after ten (10) seconds have passed since the door was opened
(the timer starts when the door is first opened).
Opening an elevator area
operator door during an auto polish cycle does
not interrupt polishing, but it does suspend elevator movement and
robot movement in the elevator area. Wafer handling will be suspended
when an elevator or robot movement is needed until the door is closed.
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