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Strasbaugh 6DS-SP - Page 48

Strasbaugh 6DS-SP
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Strasbaugh Introduction
Version 4.0 - February 1998; Update 10/19/01 1 - 29
GALLIUM ARSENIDE AND
GERMANIUM USE
The information below is applicable only to owners of Strasbaugh machines
using gallium arsenide or germanium in their processes.
NOTE
Material safety data sheets (MSDS) for gallium arsenide and germanium are
to be provided by the supplier of the wafers/wafer crystals.
GALLIUM ARSENIDE (GAAS)
Gallium arsenide is used in the semiconductor industry in the form of
polished wafers with a dark gray metallic sheen.
Gallium arsenide technology (GaAs) III-V binary compound possesses good
electrical properties, making this material highly attractive for electronic
applications. In addition, GaAs possesses good and unique optoelectronic
properties because it can be prepared in a semi-insulating state or behavior.
- Electronic Materials Handbook, ASM International, Vol. 1, pp. 199.
HEALTH WARNING
Arsenic is a neurotoxin and a suspected skin and lung carcinogen. Poisoning
may affect the heart, gastrointestinal system, kidneys, and liver. Its NFPA
Rating for Health is 2 on a scale of 0 - 4.
INGESTION
If ingestion occurs, obtain immediate medical attention. The following
effects may result: vomiting, diarrhea, nausea, gastrointestinal disturbances,
metallic taste in mouth, depression of bone marrow function, and/or nerve
damage.

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