Strasbaugh 6DS-SP - Page 508

Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 1
9
Mechanical Maintenance
Procedures
• CARRIERS
• CLEANING STATIONS
• CONDITIONING ARM
• ELEVATORS AND ROBOT
• LOAD STATIONS
• SHUTTLE
• SLURRY SYSTEM
• SPINDLES
• TABLES