Maintenance Model 6DS-SP Planarizer
9 - 8 Version 4.0 - February 1998
CARRIERS
The carrier maintenance procedures below provide step-by-step instructions for
changing wafer backing inserts as well as carrier assembly and disassembly for
replacement of worn parts or changing of shim sizes.
Note that the figures accompanying the procedures are not drawn to scale.
Rather, they are intended to communicate positioning of components.
ASSEMBLY DRAWING AND ASSOCIATED PART LISTS
Refer to Appendix B, located in Volume Two of this manual, for the following
resources:
ASSEMBLY DRAWING WITH SYMIX PART NUMBERS
LABELED
6DS-SP ACC 72 CARRIER TOOL KIT
- BILL OF MATERIALS; PART # 218327
6DS-SP ACC 30R (200 MM) CARRIER SPARE PARTS KIT
- BILL OF MATERIALS; PART # 233556
6DS-SP ACC 45R (150 MM) CARRIER SPARE PARTS KIT
- BILL OF MATERIALS; PART # 233555
6DS-SP ACC 58 (125 MM) CARRIER SPARE PARTS KIT
- BILL OF MATERIALS; PART # 225134
6DS-SP ACC 56 (100 MM) CARRIER SPARE PARTS KIT
- BILL OF MATERIALS; PART # 225133
6DS-SP ACC 57 (75 MM) CARRIER SPARE PARTS KIT
- BILL OF MATERIALS; PART # 225132
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