Operations Model 6DS-SP Planarizer
1 - 36 Version 4.0 - February 1998; Update 10/19/01
ENVIRONMENTAL INFORMATION
During wafer processing, the wastewater generated must be monitored--it
cannot be allowed to flow freely into an open drain. Consult local, state, or
federal EPA regulations for proper disposal. The wastewater may be
collected in compatible 55-gallon drums for waste disposal through a
licensed facility. If available, the wastewater may be piped to a wastewater
treatment plant on-site.
In the event of spill or leak, the company’s Hazardous Materials Response
Team should be notified. While wearing full protective equipment, the
response team should cover the spill with dry sand, vermiculite, or any other
approved absorbent material. Mix well and carefully transfer the
contaminated absorbent material to an approved container used only for
germanium waste. Do not mix used absorbent materials from different
spills without consulting the safety officer, hazardous materials officer, or
other designated person in your company. Local, state, or federal EPA
regulations should be consulted for proper disposal. Consult your supplier
for additional methods.
See Section 7 of the germanium MSDS for additional information.
REFERENCES
- Brady, George S. and Clauser, Henry R., Materials Handbook, 13th
Edition. McGraw-Hill, Inc., New York, 1991.
- SAX’s Dangerous Properties of Industrial Materials, Eighth Edition, Van
Nostrand Reinhold, New York, 1992.
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