Maintenance Model 6DS-SP Planarizer
10 - 4 Version 4.0 - February 1998
SOFTWARE CALIBRATION
PROCEDURES
OVERVIEW
The Software Calibration Procedures chapter provides step-by-step instructions
for factory-performed procedures for software calibration of the bridge, cleaning
stations, conditioning arm, elevators, load stations, robot, slurry system, spindles,
and polish table(s).
In addition, the section on Menus Used in Software Calibration presents details
on the three menus (Manual Control, Diagnostics, and
Calibration/Configuration) used in machine maintenance and calibration.
Assumption - The procedures below were written with the assumption that the
reader is thoroughly familiar with the 6DS-SP Planarizer. If not, read the
chapters in this manual on Physical Description, Installation, Mechanical
Description, Control System Description, Power Distribution, and Plumbing
Description, as well as the Operator Functions and Machine Setup chapters of
the 6DS-SP Operations manual, before beginning any procedure.
Examples - Detailed examples are provided for all required calculations to aid
the user in following the calibration procedures.
LOCKOUT SAFETY PROCEDURE
Refer to “Safety”, located in Chapter One of this manual, for a detailed
procedure for lockout of energy sources that could cause injury to personnel.
WARNING! All energy sources that could cause injury to personnel
must be locked out to protect against accidental or
inadvertent operation when such operation could cause
injury to personnel.
RUNNING A SHORT TEST CYCLE
For a detailed procedure on setting up and running a short test cycle, refer to
Running a Short Test Cycle, found in the Overview section of the Mechanical
Maintenance Procedures chapter of this manual.
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