Strasbaugh 6DS-SP - Page 942

Maintenance Model 6DS-SP Planarizer
13 - 30 Version 4.0 - February 1998
NO RESPONSE FROM KEYBOARD OR NO RESPONSE FROM
MACHINE--PART B
Problem
Indicator
Problem
Location
Component/
Cause
Resolution/
Responsibility
(3) If, after
completing
Resolutions 1a
through 1e, still
no response--
indicates possible
damage to control
and polish
programs and
data.
(3a) Follow
procedures in the
Software And
Control Computer
Maintenance
chapter of the 6DS-
SP Maintenance
manual for
Restoring Control
And Polish
Programs And Data
from backup
diskettes.
MAINTENANCE