Maintenance Model 6DS-SP Planarizer
13 - 48 Version 4.0 - February 1998
“WAFER AT LEFT SND ELEVATOR” - # 100
“WAFER AT RIGHT SND ELEVATOR” - # 101
“WAFER AT LEFT RCV ELEVATOR” - # 102
“WAFER AT RIGHT RCV ELEVATOR” - # 103
(Only available if the elevator light sensor option has been installed.)
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Light sensor
malfunction at
affected elevator.
If the cassette
sensor arm is
lowered, the
message indicates
wafer is not fully to
the rear of the
cassette shelf.
(2) Robot end
effector incorrectly
adjusted.
(1a) Wafer has
traveled out--move it
in by hand.
(1b) Check the light
sensor adjustment.
(1c) Observe the robot-
-if the robot does not
move all the way into
the cassette or pull out
correctly, check the
robot calibration at the
elevators (refer to the
Software Calibration
chapter of the 6DS-SP
Maintenance manual).
(2a) Check that the
robot end effector is
correctly adjusted and
picking up wafers.
MAINTENANCE
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