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Page 66 of 66
TVP Manual (full) March 2007 CE rev 03.doc
Partial pressure of water vs. Temperature and pumping efficiency
-150
-140
-130
-120
-110
-100
-90
-80
-70
-60
-50
-40
6.7E+00
1.3E+00
2.7E-01
6.7E-02
1.3E-02
2.7E-03
6.7E-04
1.3E-04
2.7E-05
6.7E-06
1.3E-06
2.7E-07
6.7E-08
1.3E-08
2.7E-09
mbar
T oC
98% efficiency
95% efficiency
90% efficiency
Diagram 23 Pumping efficiency of H
2
O at partial pressure (mbar) vs. Temperature
o
C