TABLE OF CONTENTS
4.5 Installation of the Quartz Tube.................................................. 4-5
4.6 Test and Calibration Procedure ................................................ 4-6
4.7 Pre-Cleaning of the Process Tube............................................ 4-6
4.8 Automatic profiling procedure ................................................... 4-8
4.8.1 Automatic profiling procedure .................................... 4-8
4.8.1.1 Introduction to profiling................................ 4-8
4.8.1.2 Profiling recipe setup................................... 4-9
4.8.2 automatic profiling preparation ................................ 4-11
4.8.3 Paddle TC installation.............................................. 4-11
4.8.3.1 Profile recipe selection .............................. 4-12
4.8.4 Automatic profiling RUN .......................................... 4-12
4.8.5 Summary automatic profiling ................................... 4-13
5. Maintenance ......................................................... 5-1
5.1 Introduction ............................................................................... 5-1
5.2 Heating Element Coil ................................................................ 5-1
5.3 Heating elements...................................................................... 5-3
5.4 The SCR-Module ...................................................................... 5-3
5.5 Heat Exchanger ........................................................................ 5-4
5.6 Tube change............................................................................. 5-5
5.7 Tube change diffusion system tubes......................................... 5-5
5.8 Tube change LPCVD and vacuum system tubes ..................... 5-6
5.9 Preventive Maintenance ........................................................... 5-7
6. Calibration/Adjustments ..................................... 6-1
7. Trouble Shooting ................................................. 7-1
FURNACE REFERENCE MANUAL
II
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