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VSP63-de-120207
6 Technical Data
Measurement Principle Heat conduction (impuls Pirani), depending on gas type
Materials with vacuum
contact
stainl. steel 1.4307, Tungsten, Nickel, glass
Measuring Range 1000 - 1,0x10
mbar (750 - 1,0x10
Torr) abs.
Max. Overload 4 bar abs.
Accuracy 1000 - 20mbar: ca. 30 % from reading
20 - 0,001mbar: 10 % from reading
< 0,001mbar: < factor 2 from reading
Repeatability 20 – 0.001mbar: 2% from reading
Response Time < 200 ms
Power Supply 15 – 30 VDC
Electrical Connection Type Hirschmann, 6pin, male, lockable
Power Consumption max. 1.0 W with 24 V supply voltage
Operating Temperature 5...60
C
Storage Temperature -20...+70
C
Bakeout Temperature 80
C at the flange
Output Signal
0 – 10 VDC, load > 10
range 1.5 – 8.5 VDC, logarithmic (1V/decade)
Vacuum Connection VSP63MV: small flange DN16 ISO KF
VSP63MVSW: DN16KF with hose nozzle 9,5mm
VSP63MVCF: conflat flange DN16 CF
Protection Class IP 40
Weight 120g