Ulvac GLD-201B - 8 Maintenance Parts; Maintenance Parts List

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8. Maintenance parts
8.1 Maintenance parts list
Table 5 GLD-137CC Maintenance parts list
Product name No.
Parts name Q’ty
16
Outlet valve 2
17
Outlet valve spring 2
24
Check valve 2
25
Check valve spring 2
49
Oil seal_HTC-17-40-9 1
50
Oil seal_SC-17-30-7 2
51
Oil seal_SC-15-30-7 1
52
O-ring_P-12 1
53
O-ring_P-12.5 1
54
O-ring_P-35 1
55
O-ring_S-5 3
56
O-ring_S-12 1
57
O-ring_S-16 2
58
O-ring_S-20 1
59
O-ring_S-30 2
60
O-ring_S-45 1
61
O-ring_S-70 4
62
O-ring_G-55 1
63
O-ring_V-175 1
64
O-ring_JASO1016 1
65
O-ring_JASO3056 1
66
O-ring_N-28 1
GLD-137
Maintenance kit A
92
O-ring_P-20 1
13
1st vane 2
14
2nd vane 2
15
Vane spring 5
GLD-137
Maintenance kit B
41
Spider 1
Note : For the relationship between components, see the disassembly drawing.