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HELIOT 900
Ulvac HELIOT 900 - User Manual
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No.SK00-79
91-BI-002-1
3
Operations Manual
The contents
of this
manual cover
equipment
with the
following seri
al numbers a
nd softwar
e versions
Serial
Number:
0101 or higher
Software Version:
1.69_383 or higher
ULVAC, Inc.
http://www.ulva
c.co.jp/
Pl
e
a
s
e
r
e
a
d
t
hi
s
m
an
u
a
l
be
fo
re
us
in
g
th
e e
qu
ipm
en
t.
Store it carefu
l
ly in a rea
d
ily access
ible place.
2
Table of Contents
Main Page
Safety Symbols
2
Prior to Use
2
Safety Precautions
3
Handling Precautions
4
Notes
4
Table of Contents
5
HELIOT 900 Series Specifications and Configurations
10
General Specifications
10
Common Specifications
10
Common Specification
11
Base Type (901W1/901D2)
11
Mobile Type (904W2/904D3/904D4)
11
Sniffer Unit Specification (Optional)
11
Specifications by Display Unit
11
Tablet Type
11
Panel Mount Type(-P)
11
Heliot Configuration (Drawing)
13
Base Type 901W1/901D2
13
External View Low Cart
14
Mobile Type (904W2/904D3/904D4) High Cart
15
Display Unit
16
Tablet Type
16
Tablet Type Appearance
16
Tablet Stand
17
Panel Mount Type (-P)
18
Panel Mount Type Appearance
18
Panel Cutout Dimensions
18
Appearance with Mounting Bracket
19
Communication Cable
19
Sniffer Probe for AS/BS (Optional)
20
Sniffer Unit as (Optional)
20
Sniffer Unit BS (Optional)
21
Sniffer Unit BT (Optional)
21
Main Power Cable
22
Vacuum System Diagram
23
Turbo Molecular Pump Unit
24
901W1/901D2/904W2/904D3
24
904D4
25
Connector Panel
26
Measurement Principle
28
Ion Current
28
Sensitivity Calibration (Leak Rate)
29
Sensitivity Calibration (Concentration)
30
Sensitivity Value
30
Set up
31
Unpacking
31
Assembling/Moving/Installation
32
Assembling
32
Moving/Installation
33
Connection of Test Port
34
Vacuum Method
34
Sniffer Method
34
Electrical Connections
35
Installing the Display with Panel Mount Specification
36
Installation Requirements
36
Panel Mounting Procedure
37
Wiring Principles
38
Connecting the DC Power Cord
38
How to Connect Com I/F Connector
38
Storage
39
Connection of Main Unit and Tablet
40
Wire Connection
40
Wireless Connection
41
When Reconnecting
41
When Resetting Connection Point
42
Tablet Controller Charge
42
Operation Overview
43
Power Supply on - Testing - Stopping / End Test
43
Power Activation
43
Preliminary Mode
43
During Activation
44
Standby/Test
44
Stop
45
Errors
45
Power Supply off
45
Window Screen Operations
46
Menu Screen
48
Settings
50
General
50
Indication/Message
54
Serial Comm. / Ext I/O
58
Calibration Standard
62
List of Settings for Shipment from Manufacturer (Factory Default)
63
Information
65
Service
65
Start-Up Data
65
Maintenance (901W1/904W2)
66
Maintenance (901D2/904D3)
67
Error Log
67
Startup
68
Startup of Vacuum Method
68
Startup of Sniffer Method
71
Sniffer (Flow Rate)
71
Sniffer (Concentration)
72
Testing
74
Test Screen (Tablet Type)
74
Graph
74
Meter
74
Vac. DIAGRAM
75
Value
75
Test Screen (Panel Mount Type)
77
Graph
77
Value
77
Test Mode
78
Cycle Test
81
0- Zero Button and Functions
84
0-ZERO Button Condition Display
84
Difference of Settings of Auto Zero Function and Example of Use
85
How to Use Clean up
87
How to Use Cal. Start
87
How to Use Cal.check
88
End of Testing
88
Hydrogen Measurement
88
Error Modes
89
Warning Errors
89
Caution Errors
90
List of Error Messages
91
Warning Errors
91
Caution Errors
95
Maintenance
99
List of Maintenance Items
100
Maintenance Procedures
101
How to Install/Remove External Panels
101
Rotary Pump
102
Pirani Gauge Head
104
Ion Source
106
Calibration Leak
107
Sintered Metal Element of Sniffer Probe Tip
108
Microseparator (Sniffer Unit BS/BT Only)
108
Dust Filter (Sniffer BS Unit Only)
109
Dust Filter (Sniffer Unit BT Only)
110
Fan Filter Inside the Equipment
111
Intake Fan Filter
111
Oil Mist Filter
112
Vent Filter
113
Replacement of Panel Mount Specification RTC Battery Set
114
Input/Output Signals
115
Ext.I/O
115
List of Output Signals (Standard Mode: Not in Cycle Test Mode)
116
List of Output Signals ( in Cycle Test Mode)
117
List of Input Signals
119
Leak Rate
121
Output Pin Number
121
Output Table
121
Leak Rate Mantissa Portion Output Table
121
Leak Rate Exponent Portion Output Table (When NONE Is Selected for COMPATIBILITY)
121
Leak Rate Exponent Portion Output Table (When Other than NONE Is Selected for COMPATIBILITY)
122
Quasi LOG Output Table of Test Port Pressure
123
Leak Rate LOG Output Table (When NONE Is Selected for COMPATIBILITY)
123
Leak Rate LOG Output Table (When Other than NONE Is Selected for COMPATIBILITY)
124
Recorder Output Graph (Leak Rate Mantissa / Exponent Portion Output)
125
Recorder Output Graph (Test Port Pressure Quasi LOG Output)
125
Recorder Output Graph (Leak Rate LOG Output)
126
Rs232C
127
Connection of Printer
127
RS-232C Communication
130
Communication Protocol
130
Communication Cable
130
Commands
131
Status Codes
138
Test Mode Codes
140
Unit Codes
140
Communication
141
Communication Specification
141
Connection Method of Wire
141
Checksum
142
Block Configuration Diagram
142
Wiring Method
143
Basic Data Format
144
List of Commands
144
Communication Time Chart
145
List of ASCII Codes
146
Each Data
147
Description (Explanation) of each Data
147
Error Log Record Example
147
Gauge Log Print Record Example
148
Gauge Log Measurement Data Record Example
148
Startup Log Record Example
148
Screen Shot
148
Loading Method of the Data
149
Micro SD
149
USB Communication Cable
149
Guarantee
150
ULVAC Components / Certificate of Decontamination
151
Declaration of Conformity
152
Declaration of Conformity
153
Heliot 900 Series Recommended Abbreviations List
154
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Ulvac HELIOT 900 Specifications
General
Brand
Ulvac
Model
HELIOT 900
Category
Security Sensors
Language
English
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