Varian Turbo-V70LP User Manual

TECHNICAL INFORMATION
TECHNICAL SPECIFICATION
Pumping speed (l/s) With CF 4.5” or
ISO 63:
N
2
: 68 l/s
He: 60 l/s
H
2
: 45 l/s
With CF 2.75” or
KF 40 NW:
N
2
: 45 l/s
He: 50 l/s
H
2
: 41 l/s
Compression ratio N
2
: 5 x 10
8
He: 8 x 10
4
H
2
: 7 x 10
4
Base pressure* with recommended mechanical fore pump:
2 x 10
-10
mbar (1.5 x 10
-10
Torr)
with recommended diaphragm fore pump:
2 x 10
-9
mbar (1.5 x 10
-9
Torr)
Inlet flange CF 4.5" O.D.
ISO63
CF 2.75" O.D.
KF 40 NW
Foreline flange KF 16 NW
Rotational speed 75000 RPM
Start-up time < 60 seconds
Recommended fore-
pump
mechanical: Varian SD-40
diaphragm: Varian MD 6
Operating position any
Cooling
requirements
Natural air convection
Forced air or water optional
Operating ambient
temperature
+ 5° C to + 35° C
Coolant water flow: 10 l/h (0.05 GPM)
temperature: + 10° C to + 30° C
pressure: 2 to 4 bar (30 to 60 Psi)
Bakeout
temperature
120° C at inlet flange max. (CF
flange)
80° C at inlet flange max. (ISO
flange)
Vibration level
(displacement)
< 0.01 µm at inlet flange
Noise level 45 dB (A) at 1 meter
Input 54 Vac, three phase, 1250 Hz
Lubricant permanent lubrication
Installation category II
Pollution degree 2
Storage
temperature
- 20° C to + 70° C
Weight kg (lbs) ISO: 1.7 (4)
CFF: 2.5 (4)
* According to standard DIN 28 428, the base pres-
sure is that measured in a leak-free test dome, 48
hours after the completion of test dome bake-out,
with a Turbopump fitted with a ConFlat flange and
using the recommended pre-vacuum pump.
26 87-900-862-01(E)

Varian Turbo-V70LP Specifications

General

Brand	Varian
Model	Turbo-V70LP
Category	Water Pump
Language	English