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General| Brand | Veeco |
|---|---|
| Model | K465i GaN |
| Category | Industrial Equipment |
| Language | English |
Defines the usage of warnings, cautions, and notes for safety in procedures and statements.
Outlines procedures for safely isolating energy sources before maintenance to prevent accidental energization.
Provides general system specifications, including model, serial, voltage, current, frequency, and noise level.
Details seismic design considerations and requirements for equipment installation and structural loading.
Describes the function and usage of the K465i GaN system and its applications in microelectronic fabrication.
Covers the system electronics, including DeviceNet network, PLC components, and control modules.
Explains the system's alarms and interlocks, functioning on three levels for operational safety.
Details procedures for system startup after shutdown, including daily and post-maintenance.
Discusses techniques for loading and unloading substrates onto wafer carriers for processing.
Covers techniques for shutting down the system overnight and for routine maintenance procedures.
Provides basic maintenance procedures for the K465i GaN system, adapted for specific applications.
Covers maintenance, cleaning, and reassembly procedures for the reactor chamber.
Details leak checking procedures and techniques, a critical safety step for system integrity.
Explains Glovebox (VAC) operation for K-Series systems using Nexus software controls.
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