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Veeco Digital Instruments Dimension 3100 User Manual

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Document Revision History: Dimension 3100 Manual
Revision Date Section(s) Affected
Ref.
DCR
Approval
C 05/15/03 Fluid Cell N/A L. Burrows
B 06/01/00 All. 313 A. Varbel
A 08/25/97 Released. N/A M. Leilani
Copyright © 2003 Digital Instruments Veeco Metrology Group
All rights reserved.
Dimension
TM
3100 Manual
Version 4.43C
004-320-000 (standard)
004-320-100 (cleanroom)

Table of Contents

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Veeco Digital Instruments Dimension 3100 Specifications

General IconGeneral
BrandVeeco
ModelDigital Instruments Dimension 3100
CategoryIndustrial Equipment
LanguageEnglish

Summary

Chapter 1 System Overview

1.1 Overview

General introduction to the Dimension 3100 SPM and its capabilities.

1.2 How to Reach Digital Instruments Veeco

Contact information and support details for Digital Instruments Veeco.

1.3 System Overview

Details on the typical configurations and features of the Dimension 3100 SPM.

1.3.1 Dimension 3100 SPM Features

Lists and describes key features of the Dimension 3100 SPM, including stage and controller.

1.4 Control Station Overview

Describes the components of the Dimension 3100 SPM control station.

1.4.1 Input and Display Devices

Details the keyboard, monitors, and trackball used for system operation.

1.4.2 Computer

Explains the role of the computer as the main control unit for the SPM system.

1.4.3 NanoScope IIIa Controller

Describes the NanoScope IIIa controller's function in managing microscope head and scanning.

1.4.4 Dimension 3100 Controller

Explains the Dimension 3100 controller's role in vacuum, air supply, and optics illumination.

1.5 Dimension 3100 SPM Overview

Provides an overview of the Dimension 3100 SPM system's main components.

1.5.1 Dimension 3100 Microscope Electronics Box

Details the function and components of the Microscope Electronics Box.

1.5.2 Optics and Motors Overview

Explains the optic system's role in locating the cantilever and tip relative to the sample.

1.5.3 Stage System

Describes the Dimension 3100 X-Y and Z stage systems and their capabilities.

1.5.4 Dimension SPM Head

Explains the function of the Dimension SPM Head in imaging stationary samples.

1.5.5 Cantilever Holder

Describes the cantilever holder and its role in different operating modes.

1.6 Sample Size & Handling

Details the sample size limitations and handling recommendations.

1.7 Facilities Specifications

Refers to Chapter 3 for facility site, safety, and configuration requirements.

1.8 Applications

Lists common applications of the Dimension 3100 SPM.

1.9 Maintenance and Troubleshooting

Refers to Chapter 18 for maintenance and troubleshooting information.

Chapter 2 Safety

2.1 Overview

Introduces safety requirements for installation and operation of the Dimension 3100 SPM.

2.2 Safety Requirements

Details safety symbols and their meanings.

2.3 Safety Precautions

Provides crucial precautions for operators to avoid injury and damage.

2.3.1 General Operator Safety

Lists general safety guidelines for operators working with the system.

2.6 Equipment Safety Applications

Covers safety applications related to equipment.

2.6.1 Dimension 3100 SPM Facility Requirements

Shows the physical footprint and space requirements for the Dimension 3100 SPM.

2.7 Power-up Sequence (Installation and Service Only)

Details the power-up procedure for installation and service personnel, not untrained users.

2.7.1 Pre Power-up Checklist

Lists essential checks before connecting facilities and powering up the system.

2.8 Power-Up Sequence (Normal Usage)

Describes the standard procedure for powering up the system for normal operation.

2.8.1 Prepare the System for Power-up (Normal Usage)

Outlines steps to prepare the system before normal power-up.

2.8.2 Power-up Checklist (Normal Usage)

Provides a checklist for normal system power-up.

2.9 Software Power-up

Details the steps for powering up the system software.

2.10 Hazard Labels

Identifies hazard labels found on the Dimension 3100 SPM.

2.10.1 Laser Warning Labels

Describes laser warning labels and their placement.

Chapter 3 Facilities Requirements

3.1 Overview

Details facility site, safety, and configuration requirements for the Dimension 3100 SPM.

3.2 Optional Configurations

Describes typical configurations for the Dimension 3100 SPM, including vibration isolation.

3.2.1 Axiom VT-103-3K with ELCON

Details the VT-103-3K and ELCON console configuration.

3.2.2 Axiom VT-102

Describes the VT-102 configuration with an air table and typical "table top" control station.

3.2.3 Axiom IS3K-2

Details the compact IS3K-2 configuration with integrated vibration isolation and acoustic enclosure.

3.3 Facilities Requirements

Provides facility requirements, including weight and general notes.

3.4 Acoustic/Vibration Isolation Systems

Discusses systems for acoustic and vibration isolation.

3.4.1 Axiom IS3K-2 Dimensions, Utilities, and Clearance

Provides dimensions, utilities, and clearance information for the Axiom IS3K-2.

3.4.2 Axiom VT-103-3K Dimensions, Utilities and Clearance

Provides dimensions, utilities, and clearance information for the Axiom VT-103-3K.

3.4.3 Axiom VT-102 Dimensions and Utilities

Provides dimensions and utilities for the Axiom VT-102 vibration isolation table.

3.4.4 Computer/Controller Facility Requirements

Details facility requirements for the computer and controller setup.

3.4.5 ELCON Console

Describes the ELCON console as an optional enclosure for computer/controller.

3.5 Facilities Requirements Summary

Summarizes facilities requirements for different configurations.

3.6 Environmental Acoustic/Vibration Specifications

Specifies environmental conditions for acoustic and vibration levels.

3.7 General Facilities Guidelines

Provides general recommendations for facility setup.

Chapter 4 Installation

4.1 Overview

Details the installation procedure from receiving to full setup of the Dimension 3100 SPM.

4.2 Shipping and Receiving

Covers the necessary steps and equipment for shipping and receiving the system.

4.2.1 Equipment Requirements

Lists the essential equipment received for successful installation.

4.3 Uncrating the System

Provides instructions for safely uncrating the Dimension 3100 SPM system components.

4.3.1 Uncrate the Dimension 3100 SPM System

Step-by-step guide to uncrating the SPM system.

4.4 Installing the Dimension 3100 System

Details the process of installing the Dimension 3100 SPM unit and its components.

4.4.1 Install the Dimension 3100 SPM Unit

Instructions for placing and securing the main SPM unit.

4.4.2 Install the Control Station

Steps for setting up and placing the control station equipment.

4.5 Connecting the Dimension 3100 System

Instructions for connecting the various system components and cables.

4.5.1 Connect the Dimension 3100 Control Station Extensions

Details connecting the display and input devices to the computer.

4.5.2 Connect the Dimension 3100 Microscope Extensions

Instructions for connecting the microscope electronics box and controller.

4.6 System Power-up

Describes the procedure for powering up the entire system after installation.

Chapter 5 Stage System

5.1 Overview

Introduces the sample stage capabilities and menu commands.

5.2 Mounting of Samples

Details methods for mounting samples using vacuum chucks and magnetic pucks.

5.2.1 Vacuum Chucks

Explains the use of vacuum chucks for securing samples.

5.2.2 Magnetic Pucks

Describes using magnetic pucks for sample mounting.

5.2.3 Axis Orientation—Motorized X-Y Stages

Defines the X and Y axis orientation for stage movements.

5.3 Stage Menu Commands

Discusses important stage menu commands for sample manipulation.

5.3.1 Load New Sample

Provides instructions for loading or unloading a sample using the software.

5.3.2 Locate Tip

Details the procedure to find and center the probe tip using the optical system.

5.3.3 Align Laser

Offers a menu-driven method for aligning lasers onto cantilevers.

5.3.4 Focus Surface

Explains how to focus on the sample surface manually or automatically.

5.3.5 Move To (X,Y)

Enables quick stage indexing to a defined X-Y coordinate.

5.3.6 Set Reference

Used to set the origin point on the sample surface for subsequent moves.

5.3.7 Programmed Move

Allows automatic stage positioning using a series of memorized positions.

5.3.8 Initialize

Allows system software to locate top limit switches on SPM axis and optics axis stages.

5.3.9 SPM Parameters

Lists important Z-axis parameter values for loading/unloading and engaging samples.

Chapter 6 Cantilever Preparation

6.1 Overview

Introduces cantilever preparation for TappingMode and Contact Mode AFM.

6.2 Silicon Cantilever Substrates

Details the preparation of silicon cantilever substrates used in TappingMode.

6.2.1 Wafer Tool Kit

Lists the contents of the wafer tool kit for silicon cantilever substrates.

6.2.2 Cantilever Preparation

Provides the procedure for removing silicon cantilever substrates from the wafer.

6.2.3 Tip Shape of Etched Silicon Probes

Discusses the theoretical tip shape of etched silicon probes and their effects.

6.3 Silicon Nitride Cantilever Substrates

Details the preparation of silicon nitride cantilevers for Contact AFM.

6.3.1 Tip Shape of Silicon Nitride Probes

Describes the shape, dimensions, and spring constants of silicon nitride probes.

Chapter 7 Head, Probe, & Sample Preparation

7.1 Overview

Covers SPM setup and operation for Contact and Tapping modes.

7.2 System Information

Provides information on mouse vs. trackball, motor interlock, and laser requirements.

7.2.1 Mouse versus Trackball

Explains the exclusive operation of certain functions by the mouse and trackball.

7.2.2 Motor Interlock

Describes the software interlock against motion if a valid sum (laser signal) is not present.

7.2.3 Laser Requirements

Details precautions and requirements related to the laser system.

7.3 Basic AFM Operation

Outlines basic operational procedures for Contact Mode and Tapping Mode AFM.

7.3.1 Select the Microscope Head

Steps to set the microscope head configuration.

7.3.2 Select Mode of Operation

Instructions for selecting the desired AFM mode (Contact or Tapping).

7.3.3 Prepare the Cantilever Holder

Describes preparing the cantilever holder for substrate loading.

7.3.4 Load the Cantilever Holder

Details the procedure for installing a silicon nitride substrate onto the AFM cantilever holder.

7.3.5 Remove the Dimension SPM Head

Instructions for removing the Dimension SPM head.

7.3.6 Install the Cantilever Holder

Steps to mate the cantilever holder sockets to the Dimension SPM head pins.

7.3.7 Replace the Dimension SPM Head

Instructions for sliding the Dimension SPM head back into the dovetail groove.

7.3.8 Connect the Dimension Head

Details connecting the SPM head's 21-pin connector.

7.3.9 Align Laser

Provides procedures for aligning the laser beam relative to the cantilever.

7.3.10 Adjust Photodetector

Explains how to adjust the photodetector to center the red dot.

7.3.11 Locate Tip

Steps to locate and center the tip end of the cantilever.

7.3.12 Load the Sample

Recommends imaging the calibration sample and provides small sample preparation steps.

7.3.13 Focus Surface

Instructions for focusing on the sample surface.

7.3.14 Cantilever Tune (TappingMode only)

Details the process for tuning the cantilever in Tapping Mode.

7.3.15 Set Initial Scan Parameters

Sets initial scan parameters for parameters like scan size and scan rate.

7.3.16 Engage

Describes the process to engage the tip with the sample surface.

7.3.17 Establish Tip Clearance

Raises the Z stage to ensure tip clearance when the microscope head is installed.

7.4 Advanced AFM Operation

Discusses more subtle aspects of AFM operation.

7.4.1 Stage Parameters

Details default and adjustable stage parameters for speeding up the engage sequence.

Chapter 8 Contact AFM

8.1 Overview

Covers operating procedures for Dimension 3100 SPM in Contact Mode AFM.

8.2 Basic Contact Mode AFM Operation

Provides a general outline of basic operational procedures for Contact Mode AFM.

8.2.1 Select the Microscope Head

Steps to set the microscope head configuration.

8.2.2 Select Mode of Operation

Instructions for selecting Contact Mode as the operation mode.

8.2.3 Head, Cantilever and Sample Preparation

Instructions for installing the tip and loading the cantilever holder.

8.2.4 Align Laser

Details how to align the laser using the laser control knobs.

8.2.5 Adjust Photodetector

Explains how to adjust the photodetector to center the red dot.

8.2.6 Locate Tip

Steps to center the tip end of the cantilever under crosshairs.

8.2.7 Focus Surface

Instructions for focusing on the sample surface using the trackball.

8.2.8 Set Initial Scan Parameters

Sets initial scan parameters like scan rate and scan angle.

8.2.9 Engage

Describes the process of engaging the tip with the sample surface.

8.3 Advanced Atomic Force Operation

Provides more detailed information on AFM operation in Contact Mode.

8.3.1 Cantilever Selection

Discusses selecting appropriate cantilevers for Contact Mode AFM.

8.4 Optimization of Scanning Parameters

Explains how to optimize scan parameters for successful Contact Mode AFM application.

8.4.1 Data Type

Details how the Data type parameter affects collected data like Height and Deflection.

8.4.2 Gain Settings

Explains how Integral, Proportional, and LookAhead gains control feedback on piezo height.

8.4.3 Scan Size and Scan Rate

Discusses how scan size and scan rate affect data output.

8.4.4 Setpoint

Defines the desired voltage for the feedback loop, affecting cantilever deflection.

8.4.5 Lowpass Filter

Describes the lowpass filter for removing high-frequency noise from data.

8.4.6 Highpass Filter

Explains the highpass filter for removing low-frequency effects.

8.5 Force Calibration Mode

Allows checking the interaction between cantilever and sample surface.

Chapter 9 Contact AFM in Fluids

9.1 Overview

Details procedures for Dimension 3100 SPM operation in fluid.

9.2 Basic Principles of Contact AFM in Fluids

Discusses attractive forces due to surface tension and refractive effects.

9.3 Fluid Operation Hardware

Describes the optional fluid tip holder and protective skirt.

9.3.1 Fluid Tip Holder

Details the fluid tip holder and its components.

9.3.2 Tip Suggestions

Provides suggestions for soft cantilevers and oxide sharpened tips for biological applications.

9.3.3 Rubber Protective Skirt

Describes the rubber protective skirt used to protect the scanner tube from liquids.

9.4 Sample Mounting

Provides general notes on sample binding and preparation for fluid operation.

9.4.1 General Notes on Sample Binding

Discusses immobilizing samples on a rigid support and binding methods.

9.4.2 Larger Samples

Describes imaging a small region under a drop of fluid for larger samples.

9.4.3 Smaller Samples

Discusses imaging smaller samples fully immersed in a liquid bath.

9.5 Fluid Operation Procedure

Details the steps for operating the SPM in fluid.

9.5.1 Load the Cantilever Substrate

Instructions for mounting a cantilever substrate into the holder.

9.5.2 Install the Cantilever Holder

Steps for installing the fluid cantilever holder onto the SPM head.

9.5.3 Install the Protective Skirt

Instructions for installing the protective skirt.

9.5.4 Align Laser

Refers to Chapter 7 for laser alignment procedures.

9.5.5 “False” Reflections

Explains false reflections from the glass surface and how to ignore them.

9.5.6 Lower Tip Holder into Fluid

Describes lowering the tip holder into the liquid to form a meniscus.

9.5.7 Readjust Laser Alignment

Details how to readjust laser alignment after lowering the tip into fluid.

9.5.8 Adjust Detector Offsets and Setpoint

Steps to center the laser spot and set initial deflection and setpoint values.

9.5.9 Locate Tip

Instructions for locating the tip using the optical microscope objective.

9.5.10 Focus Surface

Procedures for focusing on the sample surface, considering fluid effects.

9.5.11 Check Scan Parameters

Verifies scan parameters like scan rate and integral gain are reasonable.

9.5.12 Engage

Describes the engage command for fluid operation.

9.5.13 Adjust Scan Parameters

Details adjusting scan parameters to obtain the best image, considering softer samples in fluids.

9.5.14 Clean Fluid Cell and Protective Skirt

Provides steps to clean the fluid cell and protective skirt to reduce contamination.

Chapter 10 Tapping Mode AFM

10.1 Overview

Details procedures for operating Dimension 3100 SPM in Tapping Mode in air.

10.2 Principles of Tapping Mode

Explains the principles of cantilever oscillation and signal generation in Tapping Mode.

10.3 Basic Tapping Mode AFM Operation

Outlines basic operational procedures for Tapping Mode AFM.

10.3.1 Select the Microscope Head

Steps to set the microscope head configuration.

10.3.2 Select Mode of Operation

Instructions for selecting Tapping Mode.

10.3.3 Head, Cantilever and Sample Preparation

Instructions for installing the tip and loading the cantilever holder.

10.3.4 Align Laser

Details how to align the laser using control knobs.

10.3.5 Adjust Photodetector

Explains how to adjust the photodetector.

10.3.6 Locate Tip

Steps to locate and center the tip end of the cantilever.

10.3.7 Focus Surface

Instructions for focusing on the sample surface.

10.3.8 Cantilever Tune

Describes finding the resonance peak and adjusting oscillation voltage.

10.3.9 Set Initial Scan Parameters

Sets initial scan parameters for Tapping Mode.

10.3.10 Engage

Describes the engage command for bringing the tip into tapping range.

10.4 Withdraw the Tip

Steps for withdrawing the tip and ascending to sample clearance height.

10.5 Advanced Tapping Mode AFM Operation

Discusses subtle aspects of operating the Dimension 3100 in Tapping Mode.

10.5.1 Resonating Techniques

Highlights the importance of understanding cantilever resonating techniques.

10.5.2 Cantilever Oscillation

Explains the role of cantilever oscillation response in Tapping Mode.

10.5.3 Decreasing the Cantilever Drive Frequency

Discusses tuning drive frequency to improve scanning performance.

10.5.4 Optimization of Scanning Parameters

Encourages review of Section 8.4 for parameter optimization.

10.5.5 Data Type

Explains how Data type parameter affects collected data in Tapping Mode.

10.5.6 Gain Settings

Details setting Integral and Proportional gains for Tapping Mode.

10.5.7 Scan Size, Scan Rate, and Setpoint

Discusses how scan size and scan rate affect data output.

10.6 Troubleshooting

Provides guidance for common troubleshooting issues in Tapping Mode.

10.6.1 Frequency Response Plot

Troubleshooting steps if a peak in the frequency response plot does not appear.

10.6.2 Engaging the Sample

Troubleshooting steps if the engage process aborts.

Chapter 11 TappingMode AFM in Fluids

11.1 Overview

Details Tapping Mode operation in fluids and related procedures.

11.2 Principles of Tapping Mode in Fluids

Discusses advantages of Tapping Mode in fluid for imaging under native liquid conditions.

11.3 Precautions

Provides crucial precautions, especially regarding fluid spillage.

11.3.1 Spillage Precautions

Outlines precautions to prevent fluid spillage around the SPM.

11.4 Basic Tapping Mode AFM in Fluids Operation

Provides basic operational procedures for Tapping Mode AFM in fluids.

11.4.1 Select the Microscope Head

Steps to set the microscope head configuration.

11.4.2 Select Mode of Operation

Instructions for selecting Tapping Mode.

11.4.3 Head, Cantilever and Sample Preparation

Instructions for head, cantilever, and sample preparation for fluid operation.

11.4.4 Align Laser

Refers to Chapter 7 for laser alignment procedures.

11.4.5 Adjust Photodetector

Explains how to adjust the photodetector for fluid imaging.

11.4.6 Locate Tip

Steps to locate and center the tip end of the cantilever.

11.4.7 Focus Surface

Instructions for focusing on the sample surface, considering fluid effects.

11.4.8 Cantilever Tune

Details finding the cantilever resonance in fluid.

11.4.9 Set Initial Scan Parameters

Sets initial scan parameters for fluid imaging.

11.4.10 Engage

Describes the engage command for fluid operation.

11.4.11 Clean the Fluid Cantilever Holder

Provides steps for cleaning the fluid cantilever holder.

11.4.12 Select a Tip and Mount into the Tip Holder

Guides selection and mounting of tips for fluid operation.

11.4.13 Attach Protective Skirt

Instructions for attaching the protective skirt to the fluid cell.

11.4.14 Plug Fluid Cell in Dimension Head

Steps for plugging the fluid cell into the Dimension head.

11.4.15 Locate the Tip

Procedures for locating the tip with the optical microscope objective.

11.4.16 Prepare the Sample for Imaging

Steps for preparing the sample for imaging in fluid.

11.4.17 Remount the Dimension Head

Instructions for slowly remounting the Dimension head.

11.4.18 Verify that the Microscope is Dry

Ensures all Dimension 3100 surfaces are free of spilled fluid.

11.4.19 Switch to Tapping Mode

Steps to set the AFM mode parameter to Tapping.

11.4.20 Set Initial Scan Parameters

Provides initial scan parameter settings for fluid imaging.

11.4.21 Cantilever Tune

Details finding the cantilever resonance in fluid.

11.4.22 Adjust the Drive amplitude

Adjusts drive amplitude for protein samples and taller samples.

11.4.23 Re-center the Photodiode

Readjusts the photodiode until cantilever deflection is zero.

11.4.24 Engage

Describes the engage command for fluid operation.

11.4.25 Adjust the Setpoint

Optimizes setpoint for best images, often 5-10% below RMS amplitude.

11.5 Troubleshooting

Provides guidance for common troubleshooting issues in Tapping Mode AFM in Fluids.

11.5.1 Cantilever Tune Plot Looks Bad

Troubleshooting steps for poor cantilever tune plots.

11.5.2 Laser Sum Signal Absent or Weak

Troubleshooting steps for absent or weak laser sum signal.

11.5.3 Poor Image Quality

Addresses issues related to poor image quality, including tip contamination.

11.5.4 Unable to Locate Particulate Samples

Troubleshooting for difficulties locating particulate samples.

Chapter 12 Lateral Force Mode

12.1 Overview

Introduces Lateral Force Microscopy (LFM) for measuring frictional forces.

12.2 Basic LFM Operation

Outlines basic operational procedures for Lateral Force Mode.

12.2.1 Select the Microscope Head

Steps to set the microscope head configuration.

12.2.2 Select Mode of Operation

Instructions for selecting Contact Mode for LFM.

12.2.3 Head, Cantilever, and Sample Preparation

Instructions for head, cantilever, and sample preparation for LFM.

12.2.4 Align Laser

Details how to align the laser for LFM.

12.2.5 Adjust Photodetector

Explains how to adjust the photodetector.

12.2.6 Locate Tip

Steps to locate and center the tip end of the cantilever.

12.2.7 Focus Surface

Instructions for focusing on the sample surface.

12.2.8 Set Initial Scan Parameters

Sets initial scan parameters, including scan angle to 90 degrees for LFM.

12.3 Advanced LFM Operation

Provides more detailed information on LFM operation.

12.3.1 Optimal Setup for Frictional Measurements

Discusses optimal setup for frictional measurements, including scan direction.

12.3.2 Identification of Friction

Explains how to verify that data obtained in Friction mode is from friction.

12.3.3 Identification of Forces Other Than Friction

Identifies phenomena that produce false features in friction data.

12.3.4 Example of Frictional Data

Provides an example of frictional data generated by Scope Mode.

Chapter 13 Force Imaging

13.1 Overview

Introduces force plots for measuring tip-sample interactions and determining setpoints.

13.2 Force Plots–An Analogy

Uses a magnet analogy to explain force plots and measurements.

13.3 Force Calibration

Explains how to check cantilever and sample surface interactions in Force Calibration mode.

13.3.1 Example Force Plot

Shows an example of a Contact Mode AFM force plot using a silicon nitride tip.

13.4 Force Calibration Control Panels

Details how control panel windows manipulate the microscope in Force Calibration mode.

13.4.1 Main Controls (Ramp Controls)

Explains parameters for Z scan start, ramp size, data scale, and number of samples.

13.4.2 Main Controls (Display)

Describes units selection and X Rotate parameter for indentation.

13.4.3 Channel 1, 2, 3 Panels

Explains Data Scale for vertical scaling of deflection signal.

13.4.4 Feedback Controls

Details deflection and amplitude setpoints for Contact and Tapping Modes.

13.4.5 Scan Mode

Discusses triggers for obtaining Force Plot and Force Volume plots.

13.4.6 Menu Bar Commands

Describes Capture button and Probe Menu Commands.

13.5 Force Calibration (Contact Mode AFM)

Provides steps for obtaining a good force curve in Contact Mode AFM.

13.5.1 Obtaining a Good Force Curve

Details adjusting Z motion and shifting the graph for a good force curve.

13.5.2 Helpful Suggestions

Discusses situations where obtaining a good force curve is difficult.

13.5.3 Advanced Techniques

Covers sensitivity determination and force minimization techniques.

13.6 Force Calibration (Tapping Mode)

Explains force calibration procedures for Tapping Mode cantilevers.

13.6.1 Force Plots

Describes generating Tapping Mode force plots using silicon calibration references.

13.6.2 Obtaining a Force Plot (Tapping Mode)

Steps to generate a Tapping Mode force plot.

13.6.3 High Contact Force

Discusses dangerous conditions of pushing the tip too far into the sample.

13.6.4 Plotting Phase Versus Frequency in Tapping Mode

Describes plotting phase versus frequency for improved observation of forces.

13.7 Force Modulation

Describes operation of force modulation mode for imaging local sample stiffness.

13.7.1 Introduction

Introduces force modulation for imaging composite materials or soft samples.

13.7.2 Selecting a Force Modulation Tip

Discusses selecting a force modulation cantilever based on spring constant.

13.7.3 Operating Principle

Explains the principle of force modulation using cantilever oscillation.

13.7.4 Force Modulation Procedure

Gives instructions for operating in Force Modulation mode.

13.7.5 Notes About Artifacts

Discusses artifacts like aliasing and edge effects in force modulation images.

13.8 Force Modulation with ‘Negative LiftMode’

Introduces a new form of force modulation imaging for softer materials.

13.8.1 Find Resonance of the Bimorph

Steps to find the bimorph resonance frequency.

13.8.2 Set Interleave Controls

Procedures for setting interleave controls.

13.8.3 Obtain a Tapping Mode Image

Instructions to obtain a satisfactory Tapping Mode image.

13.8.4 Obtain a Negative LiftMode Force Modulation Image

Steps to obtain a negative LiftMode force modulation image.

13.9 Force Volume

Combines force measurement and topographic imaging for mapping interaction forces.

Chapter 14 Interleave Scanning

14.1 Overview

Introduces Interleave Scanning as an advanced feature for simultaneous data acquisition.

14.2 Interleave Scanning

Discusses applications like MFM and EFM using LiftMode.

14.3 Basic Interleave Scanning Operation

Outlines basic operational procedures for Interleave Scanning.

14.3.1 Select the Microscope Head

Steps to set the microscope head configuration.

14.3.2 Select Mode of Operation

Instructions for selecting Tapping Mode.

14.3.3 Head, Cantilever and Sample Preparation

Instructions for head, cantilever, and sample preparation for Interleave Scanning.

14.3.4 Align Laser

Details how to align the laser for Interleave Scanning.

14.3.5 Adjust Photodetector

Explains how to adjust the photodetector.

14.3.6 Locate Tip

Steps to locate and center the tip end of the cantilever.

14.3.7 Focus Surface

Instructions for focusing on the sample surface.

14.3.8 Set Initial Scan Parameters

Sets initial scan parameters for Interleave Scanning.

14.3.9 Engage

Describes the engage command for Interleave Scanning.

14.4 Interleave Scanning/Lift Mode Operation

Details basic Lift Mode operation for Interleave Scanning.

14.4.1 Basic Lift Mode Operation

Outlines basic operational procedures for Lift Mode.

14.5 Advanced Lift Mode Operation

Discusses advanced Lift Mode operations.

14.5.1 Lift scan height

Explains how lift scan height affects lateral and vertical resolutions.

14.5.2 Tip Shape

Defines tip separation in Lift Mode terms of Z direction.

14.5.3 Scan Line Direction

Recommends setting Line direction to Retrace for interleaved scans.

14.6 Lift Mode with Tapping Mode

Covers additional considerations for using Lift Mode with Tapping Mode.

14.6.1 Main Drive Amplitude and Frequency selection

Discusses setting main drive parameters before engaging.

14.6.2 Setpoint Selection

Explains setpoint selection for Tapping Mode in Lift Mode.

14.6.3 Interleave Drive Amplitude and Frequency Selection

Discusses setting interleave drive parameters independently.

Chapter 15 Magnetic Force Microscopy

15.1 Overview

Describes performing Magnetic Force Microscopy (MFM) using Interleave and LiftMode.

15.2 Magnetic Force Microscopy

Explains how MFM scans for topographic and magnetic force information.

15.2.1 Force Gradient Detection

Details how frequency shifts are detected for magnetic force gradients.

15.2.2 Amplitude Detection Techniques

Discusses amplitude detection techniques for MFM imaging.

15.3 Basic MFM Operation

Provides instructions for performing basic MFM imaging using LiftMode.

15.3.1 MFM Using LiftMode

Details instructions for obtaining MFM images using LiftMode.

15.3.2 Magnetic Force Microscopy Procedure

Outlines the procedure for performing MFM, including probe magnetization.

15.4 Advanced MFM Operation

Discusses advanced MFM operations.

15.4.1 Lift Scan Height and Magnetic Imaging Resolution

Explains how lift scan height affects MFM imaging resolution.

15.4.2 Linear Lift

Describes linear lift for measuring topography.

15.4.3 Fine Tuning Interleave Controls

Discusses setting interleave control parameters.

15.4.4 Drive Amplitude

Explains how drive amplitude affects MFM image quality and signal-to-noise.

15.5 Installation of Extender Electronics Module

Provides instructions for installing the Extender Electronics Module.

15.6 Troubleshooting

Offers troubleshooting advice for MFM imaging.

15.6.1 MFM Image Verification

Checks parameters for obtaining a good MFM gradient image.

15.6.2 Saturation in Amplitude Detection

Addresses image saturation issues in amplitude detection.

15.6.3 Optical Interference

Discusses optical interference in Lift images and how to alleviate it.

Chapter 16 Electric Techniques

16.1 Overview

Describes performing Electric Force Microscopy (EFM) and Surface Potential imaging.

16.2 Electric Techniques Overview

Introduces EFM and Surface Potential imaging using LiftMode.

16.2.1 Electric Force Microscopy Overview

Explains how EFM measures variations in electric field gradient.

16.2.2 Surface Potential Imaging Overview

Describes surface potential imaging by adjusting tip voltage.

16.3 Electric Force Microscopy

Details the theory and procedures for Electric Force Microscopy.

16.3.1 Electric Force Microscopy Theory

Explains EFM theory based on cantilever resonant frequency changes.

16.3.2 Electric Force Microscopy Preparation

Explains how to apply voltage to the tip or sample, including jumper configurations.

16.3.3 Electric Force Microscopy Procedures

Details procedures for phase, frequency modulation, and amplitude detection.

16.4 Surface Potential Detection

Covers surface potential measurement using the Extender Electronics Module.

16.4.1 Surface Potential Detection Theory

Explains surface potential measurement theory and applied voltage.

16.4.2 Surface Potential Detection Preparation

Details preparation for applying voltage to the sample or tip.

16.4.3 Surface Potential Imaging Procedure

Provides step-by-step instructions for surface potential imaging.

16.4.4 Open Loop Operation

Describes running Potential in an open-loop configuration for qualitative data.

16.5 Troubleshooting

Provides troubleshooting guidance for Surface Potential feedback loop instability.

Chapter 17 Calibration

17.1 Overview

Provides detailed instructions for fine calibration and troubleshooting common issues.

17.2 SPM Calibration Overview

Explains the software-guided calibration procedure and theory.

17.2.1 Theory Behind Calibration

Discusses scanner characteristics and nonlinear relationships for calibration.

17.3 Sensitivity and Scanner Calibration

Covers checking SPM measuring accuracy and scanner properties.

17.3.1 Scanner Properties

Describes scanner components and their unique "personalities" measured by sensitivity.

17.4 Calibration References

Discusses the use of calibration references for scanner control parameter setup.

17.5 Small Scan Size Calibration

Recommends calibrating the scanner for small scan sizes.

17.6 Full X-Y Calibration Routine

Details the procedure for optimizing linearity correction parameters.

17.6.1 Linearity Correction

Provides a procedure to optimize linearity correction parameters for scanners.

17.6.2 X-Y Calibration using Capture Calibration

Explains how to calibrate scanners using set parameters in NanoScope software.

17.6.3 Off-line / Utility / Autocalibration

Describes the final correction step after capture calibration.

17.7 Fine-tuning for X-Y Calibration

Provides procedures for fine-tuning SPM for maximum X-Y measuring accuracy.

17.7.1 Prepare System for Fine-tuning

Steps to prepare the system for fine-tuning X-Y calibration.

17.7.2 Measure Horizontally at 440V Scan Size

Measures horizontally at 440V scan size to check accuracy.

17.7.3 Measure Vertically at 440V Scan Size

Measures vertically at 440V scan size to check accuracy.

17.7.4 Measure Horizontally at 150 V Scan Size

Measures horizontally at 150V scan size for fine-tuning.

17.7.5 Measure Vertically at 150 V Scan Size

Measures vertically at 150V scan size for fine-tuning.

17.7.6 Change Scan angle and Repeat Calibration Routines

Repeats calibration steps with changed scan angle.

17.8 Calibrating Z

Details the procedure for calibrating the Z-axis.

17.8.1 Engage

Steps to engage the microscope for Z calibration.

17.8.2 Capture and Correct an Image

Instructions for capturing and correcting an image for Z calibration.

17.8.3 Measure Vertical Features

Measures vertical features using Depth analysis.

17.8.4 Correct Z Sensitivity

Describes how to correct the Z sensitivity parameter.

17.8.5 Recheck Z-axis Measuring Accuracy

Steps to recheck Z-axis measuring accuracy.

17.8.6 Calculate Retracted and Extended Offset Deratings

Details calculating offset deratings for Z-axis calibration.

Chapter 18 Maintenance and Troubleshooting

18.1 Overview

Covers maintenance procedures and troubleshooting common problems.

18.2 Maintenance

Details maintenance procedures for the Dimension SPM.

18.2.1 Returning Components for Repair

Procedures for returning components for repair.

18.2.2 Cleaning the Cantilever Holder

Instructions for gently cleaning the cantilever holder.

18.2.3 Cleaning the Cantilever Holder Contacts

Periodically cleaning electrical contacts for the holder.

18.2.4 Clean the Sample Holder and X-Y Stage Surfaces

Weekly cleaning of the sample holder and stage surfaces.

18.2.5 Changing the Illuminator Light Bulb

Steps for replacing the illuminator light bulb.

18.3 Troubleshooting

Provides a general overview of software main menu items and troubleshooting.

18.3.1 Software Main Menu Items

General overview of Real-time menu items.

18.3.2 Contact Mode AFM

Explains general operating concepts of Contact Mode AFM.

18.3.3 Problems with Contact Mode AFM

Addresses common problems encountered in Contact Mode AFM.

18.3.4 Tapping Mode AFM

Explains general operating concepts of Tapping Mode AFM.

18.3.5 Problems with Tapping Mode AFM

Discusses common problems specific to Tapping Mode AFM.

18.3.6 Initialize

Procedure to re-initialize the system if Focus Surface or Locate Tip are grayed out.

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