Calibration
17-384 Dimension 3100 Manual Rev. C
Measure Horizontally at 440 Scan Size continued...
8. Multiply the quotient obtained above by the X fast sens value
shown on the Scanner Calibration panel.
9. Enter the new value. The new value adjusts the scanner’s fast axis
to more closely match calculated distances with actual feature
distances. The new sensitivity setting takes effect as soon as it is
entered.
10. To save it to the computer’s hard disk, click on OK. This closes the
Scanner Calibration panel.
17.7.3 Measure Vertically at 440V Scan Size
1. Return to the image of the calibration reference.
2. Clear the horizontal line drawn earlier and click the right mouse
button, or click on CLEAR.
3. Draw a vertical line between features.
4. Wait for at least three full scans to allow the piezo to stabilize then
select two widely spaced features and draw a line connecting like
portions of features (top edge-to-top edge, etc.). The SPM displays
the calculated distance between features.
5. Verify that the microscope’s calculated distance agrees with the
known vertical distance. If there is significant disagreement
between the two, fine tuning is required; go to the next step. If the
displayed distance agrees with the known distance, skip to Section
17.7.4.
6. Based upon the results from the step above, divide the known
distance by the distance displayed next to the line drawn a few steps
earlier.
Known distance between features
SPM-calculated distance between features
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