Veeco Digital Instruments Dimension 3100 - 3.5 Facilities Requirements Summary

Facilities Requirements
3-60 Dimension 3100 Manual Rev. C
3.5 Facilities Requirements Summary
If the Dimension 3100 system is used in a clean room with raised floors a
pedestal must be provided to support leveling feet on the IS3K-2 acoustic
hood. House vacuum is optional in all cases. If used, connections should accept
a 1/8" or 1/4" male NPT fitting or 170 ID x .250 OD flexible house.
Note: The following summary does not include
computer/controller or optional elcon console
enclosure requirements.
Table 3.5a: Dimension 3100 Facilities Requirements Summary
Utility With
Dimension 3100 with
VT-103-3K Hood/Table
Dimension 3100 with IS3K-
2 Hood/Table
Dimension 3100 with
VT-102 Table
Electrical
1,800W; single phase; 100V,
120V or 240V duplex outlet;
dedicated circuit
1,800W; single phase;100V,
120V or 240V duplex outlet;
dedicated circuit
1,800W; single phase; 100V,
120V or 240V duplex outlet;
dedicated circuit
Disconnect or
Shutoff
None required None required None required
Clean Dry Air for
Sample Chuck
Supplied with Dimension 3100
by air and vacuum supply
module
Supplied with Dimension 3100
by air and vacuum supply
module
Supplied with Dimension 3100
by air and vacuum supply
module
Clean Dry Air for
Air Table
Requires user supplied air 60-80
PSI, 1 CFM
2
None required
Requires user supplied air 60-80
PSI, 1 CFM
2
Vacuum for Sam-
ple Holddown
Supplied with Dimension 3100
or house vacuum -25in. Hg
2
Supplied with Dimension 3100
(ext. vac. supply module) or
house vac. -25 in.Hg
2
Supplied with Dimension 3100
or house vacuum -25in. Hg
2
Exhaust None required None required None required
Lan Connection
None required but network
support card included
None required but network sup-
port card is included
None required but network sup-
port card is included
Approximate
Footprints
36" x 33.0" 30.5" x 42.0" 23.0" x 23.0"
Hood and Table
Including SPM
1,100 pounds evenly
distributed
1,200 pounds (including com-
puter/controller)
750 pounds evenly distributed
Min. Door Width 36"minimum 32"minimum 26"minimum
Environment/
Noise
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