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ZYGO NewView 7200 User Manual

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Zygo Corporation
Laurel Brook Road
Middlefield, CT 06455
USA
NewView 7200 & 7300
Operating Manual
OMP-0536E

Table of Contents

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ZYGO NewView 7200 Specifications

General IconGeneral
BrandZYGO
ModelNewView 7200
CategoryLaboratory Equipment
LanguageEnglish

Summary

Warnings and Notes

General Hazard Warning

Denotes a hazard that could cause injury to personnel and damage to equipment.

Introduction

Safety Precautions

Failure to follow safety precautions could result in damage to personnel and the instrument, and may void the warranty.

Safety Labels

Failure to follow safety labels on the equipment and manual recommendations could result in damage to personnel and instrument.

NewView Optical Profiler Overview

Describes the ZYGO NewView optical profiler as a 3D surface structure analyzer using scanning white light interferometry.

Model Descriptions

NewView 7200 Model

Base optical profiler with high resolution camera, manual zoom lens, filter tray, aperture stop, and closed loop transducer.

NewView 7300 Model

Model 7200 features plus aperture stop, enhanced illuminator, faster camera, and automatic 3-position zoom lens turret.

NewView Options

Field Zoom Lenses

High-quality discrete field zoom lenses for superior image magnification, available in powers 0.5X to 2.0X.

Objective Mounting Options

Options for mounting objectives: single dovetail, manual 6-position turret, or motorized 6-position turret.

Camera Options

Standard 640x480 VGA camera; optional 992x992 1K ultra-high resolution camera.

Stage Configurations

Available stages include 1-axis, 3-axis, and 5-axis configurations with motorized options.

NewView System Components

Optical Profiler (Sensor)

Provides 3D measurement data; focus by driving sensor up/down via Z-axis motorized stage.

Interferometric Objectives

Gather light, create interference by dividing light paths, and form fringes indicating surface structure.

Part Stage

Holds the test part and provides positioning under the objective.

Electronics Enclosure

Houses system electronics, provides power, and interfaces with the computer.

Computer System

For system control, data storage, and running MetroPro software.

Worktable and Vibration Isolation

Worktable nests against isolation table; isolation table protects profiler from vibrations.

User Interface Components

Monitor, Joystick, Keyboard, and Mouse for operation and data entry.

Power Manager

Distributes power, provides surge protection, and acts as a disconnecting device.

Principle of Operation

Scanning White Light Interferometry

Uses scanning white light interferometry to image and measure surfaces without contact.

Optical Diagram

Key Optical System Components

Illustrates camera, zoom lens, F-Stop, Filter Tray, PZT, and objective function.

Installation

Installation Overview and Warnings

Describes site/utility requirements and installation instructions; warns against unauthorized installation.

Site Requirements for Installation

Covers vibration, floor stability, and acoustic noise considerations for optimal performance.

Utility Requirements

Environmental Utility Needs

Details requirements for air turbulence, temperature, and cleanliness.

Electrical and Compressed Air Specifications

Specifies electrical power needs and compressed air requirements for the system.

System Layout and Footprint

NewView Profiler Footprint

Shows dimensions for the optical profiler unit itself.

Overall System Footprint

System Dimensions and Clearances

Shows overall system dimensions including worktable and operator clearance.

Part Stage Dimensions

Manual X/Y Stage Dimensions

Provides detailed dimensions for the manual X/Y stage and parcentric stage.

Motorized Stage Dimensions

Motorized X/Y Stage Dimensions

Provides detailed dimensions for the motorized X/Y stage and parcentric stage.

Preinstallation Checklist

Preinstallation Inspection and Preparation

Steps to inspect, verify, and prepare the site and equipment before installation.

Installation Summary

Vibration Isolation Table Assembly

Instructions for unpacking and assembling the vibration isolation table.

Installation Steps

Component Placement and Connections

Steps for placing worktable, electronics, computer, and connecting cables and power.

Assembling the Optical Profiler

Optical Profiler Assembly Procedure

Steps for attaching the sensor, z-stage, rear panel, and filter tray to the column.

Changing the Sensor Height

Sensor Height Adjustment Process

Detailed steps for adjusting the sensor height using the riser plate and screws.

Assembling the Part Stage

Optimizing Part Stage Performance

Guidance on lateral alignment and part height for better stage performance.

Manual Stage Assembly

Manual Stage Setup Steps

Steps for aligning and securing the X/Y stage onto the parcentric stage.

Motorized Stage Assembly

Motorized Stage Setup Steps

Steps for mounting the motorized stage and securing it with screws.

X/Theta Stage Alignment

Stage Alignment Setup and Procedure

Using masks, Pattern Editor, and joystick for X/Theta stage alignment.

Parcentric Stage Alignment

Parcentric Stage Realignment Prerequisites

Lists requirements for parcentric stage realignment: objective, software, and alignment aid.

Parcentric Stage Alignment Steps

Detailed steps for aligning the parcentric stage using visual cues and adjustments.

Custom Part Stage Fixturing

Fixturing Considerations for Part Stages

Guidance on locating part height, using registration pins, and securing parts.

Connecting Cables

General Cable Installation Guidelines

Guidelines for removing protective caps and routing cables to avoid vibration.

Typical Cable Connections

System Component Wiring Diagram

Diagram showing typical connections between computer, monitor, microscope, and electronics.

Routing Cables

Cable Management and Routing

Instructions on routing cables from keyboard/mouse and securing profiler cables to avoid interference.

Installing Field Zoom Lenses

Field Zoom Lens Installation Steps

Detailed steps for installing field zoom lenses into the turret, including door removal and lens insertion.

Installing the Objective Turret

Objective Turret Installation Procedure

Steps for aligning, pushing, and securing the objective turret onto the sensor dovetail receiver.

Objective Mounting

Objective Mounting Options Overview

Diagram illustrating objective mounting via single dovetail or turret with adapters.

Installing Objectives into a Turret

Objective Installation into Turret Steps

Steps for removing objectives from storage, screwing in adapters, and threading objectives into the turret.

Installing a Single Objective

Single Objective Installation Procedure

Steps for mounting a single objective using the dovetail mount, including alignment and securing.

Operation

Operating the NewView System

General guidance on operating the interferometer and its core functions.

System Start-up Procedure

Steps for powering on all components and logging into Windows to start MetroPro.

Shutdown

System Shutdown Sequence

Steps for saving data, closing applications, quitting MetroPro, shutting down Windows, and powering off.

NewView Controls and Guidelines

Key Control Descriptions

Explains the function of A-Stop, Filter Tray, F-Stop, Dovetail Lockscrew, and optional Turret.

Operating Precautions

Key Safety Warnings

Highlights pinch hazards and crash warnings when operating the instrument.

Filter Tray Settings

Filter Tray Configuration Options

Details the available filter settings and their impact on coherence length and measurements.

Working With Square Dovetails

Dovetail Installation and Removal

Instructions for installing and removing items from the square dovetail receiver.

Electronics Enclosure Details

Front Panel Indicator Lights

Describes the meaning of the FAULT, MOTION STOP, EMERGENCY STOP, and POWER indicator lights.

Power and Stage Module Details

Power Module Connectors and Indicators

Details connectors, switch, receptacle, and indicators for the power module.

Stage Driver and Sensor Module Information

Describes stage axes, motor/encoder connectors, and sensor module connectors.

Joystick Controls and Operation

Joystick Functionality and Safety

Explains joystick controls for Z-axis, X/Y, Pitch/Roll, and emergency stop functions.

Manual Part Stage Operation

Manual Stage Components and Adjustment

Describes manual stage controls and how to adjust for lateral and angular alignment.

Light Level Controls

Light Level Adjustment Methods

Covers using function keys, the Light Level window, and manual adjustment keys.

Measurement Overview: Setup

Initial System Setup Steps

Details Z-Stop setup, part setup for manual/motorized stages, and objective setup for 50X/100X.

Focusing the Optical Profiler

Focusing Procedure and Light Level Adjustment

Steps for setting software controls, positioning the profiler, and adjusting focus and light level.

Finding Fringes using Light Level

Guidance on using the Light Level window to help find fringes by adjusting tip/tilt.

Nulling the Interferometer

Nulling Process and Surface Dependency

Explains nulling as minimizing fringes and how surface type affects the process.

Examples of Nulled Parts

Visual examples of correctly nulled fringes for different surface types.

Nulling Flat Surfaces

Sequence for Nulling a Flat Surface

A step-by-step visual guide illustrating the process of nulling fringes on a flat surface.

Using the F-Stop

F-Stop for Focusing Aid

Describes how the F-Stop controls illumination diameter and aids in focusing on featureless parts.

F-Stop Focus Examples

F-Stop System Out of Focus

Visual example showing the F-stop system when it is out of focus.

F-Stop System In Focus

Visual example showing the F-stop system when it is in focus with visible fringes.

Using the A-Stop

A-Stop for Illumination Control

Explains A-Stop use for controlling illumination angle, especially for thin films or narrow features.

Operational Hints and Tips

Calibration and Error File Usage

Covers lateral calibration for magnification and using system error files to eliminate artifacts.

Objective Selection Guide

Provides considerations for selecting objectives based on power, resolution, and work smart principles.

Using the 1X Michelson Objective

1X Objective Focusing and Fringe Finding

Steps for focusing and finding fringes with the 1X objective, noting its large field of view.

Using the Motorized Turret

Motorized Turret Setup and Operation

Details on setting up the turret for balanced weight and automating measurements by moving the turret.

Setting the Scan Length Control

Scan Length Control Functionality

Explains how the scan length control determines scan duration and data acquisition time.

Maintenance and Service

Maintaining the NewView Instrument

General maintenance procedures including equipment and optical component cleaning.

General Care Guidelines

Emphasizes keeping the environment clean and handling equipment, especially objectives, carefully.

Maintenance Schedule

Recommended Maintenance Intervals

Lists recommended intervals for cleaning and lubricating system components.

Spare Parts List

Common Spare Parts Identification

Lists common spare parts like fuses, line cords, and lubricants with ZYGO part numbers.

Cleaning External Surfaces

Procedure for Cleaning External Surfaces

Wiping painted surfaces and covers with a damp cloth and mild soap solution.

Cleaning Electronics Enclosure Fan Filter

Fan Filter Cleaning Procedure

Describes cleaning the fan filter using a vacuum cleaner to remove dust.

Cleaning Optics

Optics Cleaning Precautions and Materials

Details precautions for cleaning optics and lists recommended cleaning materials like gloves, tissue, and solvents.

Recommended Cleaning Procedures

Optics Cleaning Methods for Contaminants

Provides methods for cleaning optics affected by dust, dirt, fingerprints, oil, and water spots.

Lubricating the Motorized Parcentric Stage

Motorized Parcentric Stage Lubrication Steps

Detailed steps for lubricating the pitch and roll motors of the motorized parcentric stage.

Lubricating the Motorized Z Stage

Motorized Z Stage Lubrication Procedure

Steps for lubricating the Z stage carriage end plates and ballscrew.

Lubricating the Motorized X/Y Stage

Motorized X/Y Stage Lubrication Steps

Steps for lubricating the Y-axis and X-axis carriage end plates and ballscrews.

Getting Service

Service and Support Information

Information on obtaining service from ZYGO trained personnel and contacting customer support.

Returning Equipment for Service

Equipment Return Authorization Procedure

Outlines the process for returning equipment to ZYGO, including obtaining an RA number.

ZYGO Warranty and Product Support

Standard Product Warranty Terms

Details warranty periods for standard products from shipment date.

Custom Product Warranty Terms

Details warranty periods for non-standard and custom products.

Warranty Service Process

Outlines ZYGO's process for repair or replacement of defective equipment.

Product Returns Policy

Policy for returning unused and undamaged products within 30 days for credit.

Warranty Exclusions

Lists conditions and actions that void the warranty or are not covered.

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