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General| Technology | White light interferometry |
|---|---|
| Vertical Resolution | 0.1 nm |
| Light Source | LED |
| Objectives | 2.5X, 5X, 10X, 20X, 50X, 100X |
| Lateral Resolution | 0.36 μm to 4.7 μm (depending on objective) |
| Software | Mx |
| Dimensions | 74 cm (29 in) W x 66 cm (26 in) D x 76 cm (30 in) H |
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