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ZYGO NewView 7300 - User Manual

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Zygo Corporation
Laurel Brook Road
Middlefield, CT 06455
USA
NewView 7200 & 7300
Operating Manual
OMP-0536E

Table of Contents

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Summary

Introduction

Safety Precautions

Failure to follow safety precautions could result in damage to personnel and the instrument.

The NewView Optical Profiler

Describes the Zygo NewView as a general-purpose, 3D surface structure analyzer using white light interferometry.

NewView Components

Identifies and describes the main physical components of a typical NewView system.

Principle of Operation

Explains the scanning white light interferometry technique used by the NewView system.

Installation

Site Requirements

Details environmental considerations for instrument installation, including vibration, floor, and acoustic noise.

Utility Requirements

Lists electrical and compressed air requirements for the NewView system installation.

Preinstallation Checklist

Outlines essential checks and actions to perform before installing the NewView system.

Installation Summary

Provides a step-by-step overview of the system installation process.

Assembling the Optical Profiler

Details the steps for assembling the main optical profiler unit.

Assembling the Part Stage

Covers the assembly and alignment of the part stage for optimal performance.

Connecting Cables

Illustrates typical cable connections for the NewView system components.

Installing Field Zoom Lenses

Guides the user through the process of installing field zoom lenses.

Installing the Objective Turret

Details the procedure for installing the objective turret onto the sensor.

Installing Objectives into a Turret

Explains how to screw objectives into the turret using appropriate adapters.

Operation

Start-up

Provides step-by-step instructions for powering on and starting the NewView system.

Shutdown

Details the procedure for safely shutting down the NewView system and its software.

Operating Precautions

Highlights safety warnings and precautions to follow during system operation.

Joystick Details

Explains the functions and operation of the system's joystick controller.

Light Level Controls (Software)

Explains how to adjust light levels in the software for accurate measurements.

Focus

Guides the user through the process of focusing the optical profiler.

Null

Explains the concept of nulling and its importance for metrology.

Focusing and Finding Fringes

Guides on how to achieve focus and find interference fringes for measurement.

Maintenance and Service

Precautions When Cleaning Optics

Provides safety warnings and precautions to take when cleaning optical components.

Getting Service

Advises on when and how to obtain professional service for the equipment.

ZYGO NewView 7300 Specifications

General IconGeneral
TechnologyWhite light interferometry
Vertical Resolution0.1 nm
Light SourceLED
Objectives2.5X, 5X, 10X, 20X, 50X, 100X
Lateral Resolution0.36 μm to 4.7 μm (depending on objective)
SoftwareMx
Dimensions74 cm (29 in) W x 66 cm (26 in) D x 76 cm (30 in) H

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