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ZYGO NewView 7300 - NewView Components; Installation

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Manual Part Stage Details .......................................................................................... 38
Adjusting the Manual Stage ................................................................................... 38
Light Level Controls (Software) .................................................................................. 39
Light Level Function Keys ...................................................................................... 39
The Light Level Window ........................................................................................ 39
Light Level Keys (Manual Light Level Adjustment) ................................................ 39
Measurement Overview ............................................................................................. 40
1 Setup ...................................................................................................................... 40
Z-Stop Setup - Joystick .......................................................................................... 40
Part Setup - Manual Stage .................................................................................... 40
Part Setup- Motorized Stage ................................................................................. 40
Objective Setup - 50X and 100X Only ................................................................... 40
2 Focus ..................................................................................................................... 41
3 Null ......................................................................................................................... 42
Nulling is Part Dependent ...................................................................................... 42
Using the F-Stop ........................................................................................................ 43
Using the A-Stop ........................................................................................................ 44
Operational Hints ........................................................................................................ 45
Perform Lateral Calibration .................................................................................... 45
Use System Error Files .......................................................................................... 45
Select the Right Objective ..................................................................................... 45
Using the 1X Michelson Objective ......................................................................... 46
Using the Motorized Turret .................................................................................... 47
Setting the Scan Length Control ............................................................................ 48
Maintenance and Service ............................................................................................. 49
Maintaining the NewView ........................................................................................... 49
General Care .............................................................................................................. 49
Maintenance Schedule ............................................................................................... 50
Spare Parts List .......................................................................................................... 50
Cleaning External Surfaces ........................................................................................ 50
Cleaning the Electronics Enclosure Fan Filter ........................................................... 51
Cleaning Optics .......................................................................................................... 51
Precautions When Cleaning Optics ....................................................................... 51
Recommended Cleaning Materials ........................................................................ 51
Recommended Cleaning Procedures .................................................................... 52
Lubricating the Motorized Parcentric Stage ............................................................... 52
Lubricating the Motorized Z Stage ............................................................................. 53
Lubricating the Motorized X/Y Stage .......................................................................... 54
Getting Service ........................................................................................................... 55
Returning Equipment for Service ............................................................................... 55
Index ............................................................................................................................... 57

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