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ZYGO NewView 7300 - Introduction; Model Descriptions; NewView Options

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iii
Table of Contents
Introduction ..................................................................................................................... 1
Safety Precautions ....................................................................................................... 1
Safety Labels ................................................................................................................ 2
The NewView
(1)
Optical Profiler .................................................................................... 2
Model Descriptions .................................................................................................. 3
NewView Options .................................................................................................... 3
NewView Components ................................................................................................. 4
Computer Components ................................................................................................ 5
Principle of Operation ................................................................................................... 6
Installation ....................................................................................................................... 9
A Note About Installation .............................................................................................. 9
Site Requirements ........................................................................................................ 9
Utility Requirements ................................................................................................... 10
System Layout ............................................................................................................ 11
Part Stage Dimensions ............................................................................................... 13
Preinstallation Checklist ............................................................................................. 15
Installation Summary .................................................................................................. 15
Assembling the Optical Profiler .................................................................................. 17
Changing the Sensor Height ...................................................................................... 19
Assembling the Part Stage ......................................................................................... 21
Achieving Optimum Part Stage Performance ........................................................ 21
Manual Stage Assembly ........................................................................................ 21
Motorized Stage Assembly .................................................................................... 22
X/Theta (or Y/Theta) Stage Alignment ................................................................... 22
Parcentric Stage Alignment ........................................................................................ 23
Custom Part Stage Fixturing .................................................................................. 24
Connecting Cables ..................................................................................................... 25
General Cable Guidelines ...................................................................................... 25
Routing Cables ...................................................................................................... 26
Installing Field Zoom Lenses ...................................................................................... 26
Installing the Objective Turret ..................................................................................... 27
Objective Mounting ..................................................................................................... 28
Installing Objectives into a Turret ............................................................................... 29
Installing a Single Objective ....................................................................................... 30
Operation ....................................................................................................................... 31
Operating the NewView .............................................................................................. 31
Start-up ....................................................................................................................... 31
Shutdown ................................................................................................................... 32
NewView Controls and Guidelines ............................................................................. 33
Operating Precautions ........................................................................................... 34
Filter Tray Settings ................................................................................................. 34
Working With Square Dovetails ............................................................................. 34
Electronics Enclosure Details ..................................................................................... 35
Joystick Details ........................................................................................................... 37

Table of Contents

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