TABLE OF CONTENTS
1. UNPACKING THE DFC MASS FLOW CONTROLLER........................
1.1 Inspect Package for External Damage..............................................
1.2 Unpack the Mass Flow Controller.......................................................
1.3 Returning Merchandise for Repair.....................................................
2. INSTALLATION....................................................................
2.1 Primary Gas Connections.................................................................
2.2 Electrical Connections......................................................................
2.3 Communication Parameters and Connections................................
3. PRINCIPLE OF OPERATION..................................................
4. SPECIFICATIONS..................................................................
4.1 DFC 26/36/46 Mass Flow Controllers..............................................
4.2 CE Compliance................................................................................
5. OPERATING INSTRUCTIONS.....................................................
5.1 Preparation and Warm Up................................................................
5.2 Flow Signal Output Readings..............................................................
5.3 Swamping Condition...........................................................................
5.4 Set Point Reference Signal .............................................................
5.5 Valve OFF Control ..........................................................................
5.6 Valve Open/Purge ............................................................................
5.7 Analog Interface Configuration...........................................................
6. MAINTENANCE...................................................................3
6.1 Introduction........................................................................................
6.2 Flow Path Cleaning..............................................................................
6.2.1 Restrictor Flow Element (RFE).................................................
6.2.2 DFC 26 models.........................................................................
6.2.3 DFC 36/46 models........................................................................
6.2.4 Valve Maintenance ...................................................................
7. CALIBRATION PROCEDURES....................................................
7.1 Flow Calibration...................................................................................
7.2 Calibration of DFC Mass Flow Controllers.......................................
8. TROUBLESHOOTING.............................................................
8.1 Common Conditions...........................................................................
8.2 Technical Assistance............................................................................
8.3 Troubleshooting Guide....................................................................
9. CALIBRATION CONVERSIONS FROM REFERENCE GASES................
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