28
ACTUAL GAS
K FACTOR
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Phosphorous Oxychloride POCl
3
.36 .1324 6.843
Phosphorous Pentafluoride PH
5
.3021 .1610 5.620
Phosphorous Trichloride PCl
3
.30 .1250 6.127
Propane C
3
H
8
.35 .399 1.967
Propylene C
3
H
6
.40 .366 1.877
Silane SiH
4
.5982 .3189 1.433
Silicon Tetrachloride SiCl
4
.284 .1270 7.580
Silicon Tetrafluoride SiF
4
.3482 .1691 4.643
Sulfur Dioxide SO
2
.69 .1488 2.858
Sulfur Hexafluoride SF
6
.2635 .1592 6.516
Sulfuryl Fluoride SO
2
F
2
.3883 .1543 4.562
Tetrafluoroethane (Forane 134A) CF
3
CH
2
F
.5096 .127 4.224
Tetrafluorohydrazine N
2
F
4
.3237 .182 4.64
Trichlorofluoromethane (Freon-11) CCl
3
F
.3287 .1357 6.129
Trichlorosilane SiHCl
3
.3278 .1380 6.043
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl
2
FCClF
2
.2031 .161 8.36
Triisobutyl Aluminum (C
4
H
9
)AL
.0608 .508 8.848
Titanium Tetrachloride TiCl
4
.2691 .120 8.465
Trichloro Ethylene C
2
HCl
3
.32 .163 5.95
Trimethylamine (CH
3
)
3
N
.2792 .3710 2.639
Tungsten Hexafluoride WF
6
.2541 .0810 13.28
Vinyl Bromide CH
2
CHBr
.4616 .1241 4.772
Vinyl Chloride CH
2
CHCl
.48 .12054 2.788
Xenon Xe
1.44 .0378 5.858
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