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Aalborg DFC User Manual
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40
INDEX
NAME
DA
T
A
TYPE
NOTES
129
SensorTbl[8][Sensor Value]
uint
130
SensorTbl[8][Flow]
float
131
SensorTbl[9][Sensor Value]
uint
132
SensorTbl[9][Flow]
float
133
SensorTbl[10][Sensor V
alue]
uint
134
SensorTbl[10][Flow]
float
Flow in PFS. Should be 1.0
135
136
137
Note:
V
alues will be av
ailable f
or selected gas only
.
43
45
Table of Contents
Default Chapter
3
Table of Contents
3
1 Unpacking the Dfc Mass Flow Controller
5
Inspect Package for External Damage
5
Unpack the Mass Flow Controller
5
Returning Merchandise for Repair
5
2 Installation
5
Primary Gas Connections
5
Electrical Connections
6
Communication Parameters and Connections
6
3 Principle of Operation
10
4 Specifications
10
DFC 26/36/46 Mass Flow Controllers
11
CE Compliance
12
5 Operating Instructions
15
Preparation and Warm up
15
Flow Signal Output Readings
15
Swamping Condition
15
Set Point Reference Signal
16
Valve off Control
16
Valve Open/Purge
16
Analog Interface Configuration
17
6 Maintenance
17
Introduction
17
Flow Path Cleaning
18
Restrictor Flow Element (RFE)
18
6.2.2 DFC 26 Models
18
6.2.3 DFC 36/46 Models
18
Valve Maintenance
19
7 Calibration Procedures
19
Flow Calibration
19
Calibration of DFC Mass Flow Controllers
20
8 Troubleshooting
21
Common Conditions
21
Technical Assistance
21
Troubleshooting Guide
22
9 Calibration Conversions from Reference Gases
24
Appendix 1 Component Diagram
25
Appendix 2 Gas Factor Table ("K" Factors)
29
Appendix 3 Dimensional Drawings
33
Appendix 4 Sending Commands to the Dfc
35
Appendix 5 Sdproc Tables: Gas Independent Variables
41
Gas Dependent Variables
43
Appendix 6 Warranty
45
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Aalborg DFC Specifications
General
Brand
Aalborg
Model
DFC
Category
Controller
Language
English
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