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Aalborg DFC User Manual
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TRADEMARKS
Aalborg
7
is a registered trademark of Aalbor
g
7
Instruments.
Buna
7
is a registered trademark of DuPont Dow Elastometers.
Kalrez
7
is a registered trademark of DuPont Dow Elastomers.
VCR
7
is a registered trademark of Swagelok Marketing Co.
V
iton
7
is a registered trademark of Dupont Dow Elastometers L.L.C.
45
47
Table of Contents
Default Chapter
3
Table of Contents
3
1 Unpacking the Dfc Mass Flow Controller
5
Inspect Package for External Damage
5
Unpack the Mass Flow Controller
5
Returning Merchandise for Repair
5
2 Installation
5
Primary Gas Connections
5
Electrical Connections
6
Communication Parameters and Connections
6
3 Principle of Operation
10
4 Specifications
10
DFC 26/36/46 Mass Flow Controllers
11
CE Compliance
12
5 Operating Instructions
15
Preparation and Warm up
15
Flow Signal Output Readings
15
Swamping Condition
15
Set Point Reference Signal
16
Valve off Control
16
Valve Open/Purge
16
Analog Interface Configuration
17
6 Maintenance
17
Introduction
17
Flow Path Cleaning
18
Restrictor Flow Element (RFE)
18
6.2.2 DFC 26 Models
18
6.2.3 DFC 36/46 Models
18
Valve Maintenance
19
7 Calibration Procedures
19
Flow Calibration
19
Calibration of DFC Mass Flow Controllers
20
8 Troubleshooting
21
Common Conditions
21
Technical Assistance
21
Troubleshooting Guide
22
9 Calibration Conversions from Reference Gases
24
Appendix 1 Component Diagram
25
Appendix 2 Gas Factor Table ("K" Factors)
29
Appendix 3 Dimensional Drawings
33
Appendix 4 Sending Commands to the Dfc
35
Appendix 5 Sdproc Tables: Gas Independent Variables
41
Gas Dependent Variables
43
Appendix 6 Warranty
45
4
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Aalborg DFC Specifications
General
Brand
Aalborg
Model
DFC
Category
Controller
Language
English
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