11 Reliability
11.17 EM Istress[2]: Electromigration test, current stressed, 2 SMUs (A.01.20)
[Supported Analyzer]
B1500A
[Description]
Performs the Electromigration (EM) test, and plots the stress time vs resistance characteristics. This test is
performed by the sampling measurement mode as shown below.
1. applies stress current
2. performs measurement and saves measurement data
3. calculates the device failure time
[Device Under Test]
Wiring device, 2 terminals
[Device Parameters]
D: Wiring pattern length
W: Wiring pattern width
Temp: Temperature (deg C)
[Test Parameters]
IntegTime: Integration time
TotalStressTime: Total stress time
StopCondition: Measurement stop condition (%changes of wire resistance)
Port1: SMU connected to Port1, constant current output
Port2: SMU connected to Port2, constant voltage output
I1Stress: Port1 stress current
[Extended Test Parameters]
V2: Port2 voltage
V1Limit: Port1 voltage compliance
I2Limit: Port2 current compliance
HoldTime: Hold time
DelayTime: Delay time
[User Function]
Wiring resistance value R=Vport1/Iport1
[Test Output: X-Y Graph]
X axis: Accumulated stress time TimeList
Y1 axis: Port1 voltage Vport1List
Y2 axis: Wiring resistance value RList
Y3 axis: Offset from initial resistance value DeltaRList
[Test Output: List Display]
Accumulated stresss time TimeList
Port1 voltage Vport1List
Wiring resistance value RList
Offset from initial resistance value DeltaRList
[Test Output: Parameters]
FailureTime: Time to failure
Agilent EasyEXPERT Application Library Reference, Edition 8
11-45
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