11 Reliability
11.18 EM Istress2[2]: Electromigration test, current stressed, 2 SMUs (A.03.10)
[Supported Analyzer]
B1500A
[Description]
Performs the Electromigration (EM) test, and plots the stress time vs resistance characteristics. This test is
performed by the sampling measurement mode as shown below.
1. applies stress current
2. performs measurement and saves measurement data
3. calculates the device failure time
[Device Under Test]
Wiring (resistor), 2 terminals
[Device Parameters]
D: Length of pattern
W: Width of pattern
Temp: Temperature
[Test Parameters]
Port1: SMU connected to Port1, constant current output
Port2: SMU connected to Port2, constant voltage output
TotalStressTime: Total stress time.
FailureCondition: Measurement stop condition (%changes of wire resistance)
I1Stress: Port1 stress current
V1Limit: Port1 voltage compliance
IntegTime: Integration time
PointPerDecade: Number of samples in 1 decade
Interval: Sampling interval
[Extended Test Parameters]
V2: Port2 terminal voltage
I2Limit: Port2 current compliance
HoldTime: Hold time
R_Max: Y axis maximum value for resistance
StoringRuntimeData: Data save during stress output, Yes or No
[Measurement Parameters]
Port1 voltage Vport1
Port1 current Iport1
[User Function]
Resistance of wiring device R=Vport1/Iport1
[X-Y Graph]
X axis: Stress time Time (LOG)
Y1 axis: Port1 voltage Vport1 (LINEAR)
Y2 axis: Resistance of wiring device R (LINEAR)
[List Display]
Stress time Time
Port1 voltage Vport1
Resistance of wiring device R
Agilent EasyEXPERT Application Library Reference, Edition 8
11-46
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