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Alcatel Vacuum Technology Adixen ATH 1300 MT User Manual

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ATH 1300/1600 M-MT
MAGLEV HYBRID TURBOMOLECULAR PUMPS
User’s Manual

Table of Contents

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Alcatel Vacuum Technology Adixen ATH 1300 MT Specifications

General IconGeneral
BrandAlcatel Vacuum Technology
ModelAdixen ATH 1300 MT
CategoryWater Pump
LanguageEnglish

Summary

Introduction to the ATH 1300 M/MT - ATH 1600 M/MT and associated ACT controller

Pump Technology Overview

Basic description of the pump technology.

ATH 1300 M/MT and ATH 1600 M/MT Models

Details about the standard and heater band pump models.

ACT 1300 M Controller Features and Family

Features and overview of the ACT 1300 M controller family.

The Pump Operating Principle

Hybrid Technology and Five Active Axes System

Explanation of hybrid technology and the 5-axis system.

Automatic Balancing, Back-up Bearings, and Maintenance

Function of balancing, bearings, and maintenance aspects.

Battery-Free Operation and Installation Integration

Battery-free feature and pump integration in installations.

Pump Overview

Standard, Gas Purge, and Heater Band Models

Overview of pump models and gas purge function.

Pump Rotational Speed Variation

How to adjust pump speed.

ACT 1300 M Controller Details

Rear Panel Components and Connections

Connectors and ports on the controller's rear panel.

Accessories

Pump Accessories: Screen Filter, Purge Device, and Valves

Details on pump accessories like filters, purge devices, and valves.

Controller Cables: Connection, Power, and Thermostatic

Details on controller cables for connection, power, and thermostat.

Technical Characteristics

Pump Performance Specifications

Performance data for the pumps.

Controller Specifications and Dimensions

Specifications and physical dimensions of the controller.

Pump and Valve Dimensions

Dimensional data for pumps and valves.

Certificate of Compliance SEMI S2-93 A

General Safety Instructions

Electrical Installation, Product Modification, and LO/TO Warnings

Warnings on electrical installation, modification, and lock-out/tag-out.

EMC, Magnetic Fields, Handling, and Tilting Precautions

Guidelines for EMC, magnetic fields, handling, and tilting.

Pump Operation Safety and Hazardous Gas Handling

Safety for pump operation and handling hazardous gases.

Hazardous Materials, Thermal Risks, Interlocks, and Warning Labels

Precautions for hazardous materials, heat, interlocks, and labels.

Unpacking and Storage Procedures

Unpacking Steps and Packaging Use

Steps for unpacking and using packaging.

Pump and Controller Storage Conditions

Conditions for storing the pump and controller.

Pump Connections to an Installation

Connection Instructions, Securing, and Installation Specifications

Guidelines for connecting, securing, and installing the pump.

Worst Case Crash Scenarios and Load Transmission

Crash scenarios and how forces transmit to the system.

Inlet Flange Conditions and Equipment Options

Inlet flange requirements and equipment installation options.

Pump Operation Orientation

Information on pump orientation during operation.

Inlet and Exhaust Connections

Vacuum Connections, Screen Filter, and Insertable Flange

Vacuum connections, screen filter, and insertable flange mounting.

Secondary Isolation Valve Description and Mounting

Description and mounting of the secondary isolation valve.

Primary Isolation Valve at Exhaust

Installation of the primary isolation valve at the exhaust.

Air Inlet Valve Connection (Option)

Valve Function, Vacuum Connections, and Electrical/Earthing

Valve function, connection types, and electrical/earthing.

Nitrogen Purge Device Connection

Nitrogen Supply Characteristics and Connection Types

Requirements for nitrogen supply and connection types.

Adjusting Nitrogen Flow Rate

How to adjust the nitrogen flow rate.

Water Cooling Connection

Cooling Water Characteristics and Model-Specific Connections

Cooling water requirements and model-specific connections.

Electrical and Earthing for Water Cooling

Earthing instructions for the water cooling system.

Heating Band Connection

MT Model Connections and Temperature Regulation

Connecting MT models and temperature regulation.

Electrical Connection: General Safety and Setup

General Electrical Safety and Power Supply Precautions

General safety rules and power supply considerations.

Controller Installation Requirements and Connections Overview

Controller placement and connection overview.

Pump and Controller Connection Procedure

How to connect the pump and controller.

Main Power and Connector Installation Details

Connecting main power and connector installation details.

Typical Electrical Connection Diagram

Example wiring diagram for a typical installation.

“Dry Contacts” Connector Wiring

Output Signaling, Dry Contact Specs, Controller Outputs, and Contact Status

Signaling methods, output specs, and contact status.

“Inputs/Outputs” Connector Wiring

Voltage and Dry Contact Control Methods

Controlling pump via voltage or dry contacts.

Input Control Mode Command Modes

Command modes for input control.

Output Dry Contacts Functions

Functions of the output dry contacts.

"Rem." Connector Wiring

Connector Location and Analog Output Signal Details

Location of connector and analog output signal details.

Serial Link Wiring (RS 232 / RS 485)

RS 232 Connector Wiring and Examples

Wiring diagram and examples for RS232.

RS 485 Connector Wiring and Multi-Link Setup

Wiring for RS485 and multi-link setup.

RS232 and RS485 Command Descriptions

Command Conventions, Status, Errors, ADR, and DEF

Command conventions, status, errors, ADR, and DEF descriptions.

SEP, SET, SPD, STA, TIT, TMP Command Functions

Functions of SEP, SET, SPD, STA, TIT, TMP commands.

Controller Safety Instructions

General Controller Safety and Operational Warnings

Safety precautions for controller use and operational warnings.

Controller Start-up Procedures

Self-Test, Initialization, Indicators, and Display Messages

Controller self-test, initialization, indicators, and display messages.

Parameter Setting Keys and Configuration Process

Parameter setting keys and the configuration process.

Configuring the ACT Controller for Application

Access Code, Remote Mode, Analog Output, and Speed Settings

Configuration of access, remote mode, analog output, and speed.

Auto-Start, Buzzer, Temperature, Serial Link, and Timing Settings

Settings for auto-start, buzzer, temperature, serial link, and timing.

Bearing, Pump Time, Access Code, Serial Link, and Address Settings

Configuration of bearing, pump time, access code, serial link, and address.

Controlling the Pump via Front Panel

Rotation Indicator Lights and Pump Start-up

Meaning of indicator lights and pump start-up.

Speed Control, Reduced Speed, and Pump Stop

Controlling speed, using reduced speed, and stopping the pump.

Front Panel Status, Faults, Alerts, and Bearing Data Display

Displaying status, faults, alerts, and bearing data.

Local and Remote Mode Operation

Local Mode: Pumping Cycle, Controller Setup, and Start-up

Local mode setup, pumping cycle, and start-up.

Pumping Stop, Valve Control, and Stand-by Mode

Stopping the pump, controlling valves, and standby mode.

Restarts, Power Cut Handling, and Remote Mode Setup

Managing restarts, power cuts, and remote mode setup.

«External Safety» Contact Operation

External Safety Contact Functionality

How the external safety contact functions.

«INH» Inhibit Mode Operation

Inhibit Mode: Disabled vs. Valid Operation

Operation when inhibit mode is disabled versus valid.

Safety Instructions for Maintenance

Standard Precautions and Hazardous Substance Handling

General safety steps and handling hazardous substances.

Back-up Bearings Maintenance and Bearing Counter

Maintenance for bearings and bearing counter.

Diagnosis and Troubleshooting

Screen Issues and Default Troubleshooting

Troubleshooting screen problems and default states.

Defect Identification and Remedial Actions

Identifying defects and applying remedies.

Sensor, Power, Mechanical, and Connection Issue Diagnosis

Diagnosing sensor, power, mechanical, and connection issues.

Rotor, Temperature, and Bearing Issue Diagnosis

Diagnosing rotor position, temperature, and bearing issues.

Memory, Compatibility, and Connection Failure Troubleshooting

Resolving memory, power, compatibility, and connection failures.

Power On, Start-up, Motor Load, and Vibration Troubleshooting

Diagnosing power on, start-up, motor load, and vibration problems.

Speed and Leak Issue Troubleshooting

Diagnosing pump speed and chamber leak issues.

Thermostatic Temperature Troubleshooting

Diagnosing why the thermostatic temperature is not reached.

Shipping Procedure for Contaminated Pumps

Procedure, Safety, and Required Accessories

Procedure, safety precautions, and required accessories.

Rough Decontamination Procedure

Steps for decontaminating the pump.

Spare Parts - Instructions of Use

Part Replacement and Non-Genuine Parts Warnings

Guidelines on part replacement and warnings against non-genuine parts.

First Level Maintenance Parts

Seals, O-rings, Fuses, and Valve Accessories Part Numbers

Part numbers for seals, O-rings, fuses, and valve accessories.

Pumping Curves

Pumping Speed vs. Inlet Pressure

Graphs showing speed vs inlet pressure.

Flow Rate vs. Inlet Pressure Curves

Graphs showing flow rate vs inlet pressure.

Safety Questionnaire

Return Procedure and Risk Identification

Procedure for returning equipment and identifying risks.

Equipment, Process, and Substance Contact Confirmation

Details on equipment, process, and confirmation of substance contact.

Declaration of Conformity

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