R·I·T Title: ASML Stepper
Semiconductor & Microsystems
Fabrication Laboratory
Revision: B Rev Date: 12/21/2010
RIT SMFL Page 4 of 11
6
INSTRUCTIONS
6.1 Starting the System
6.1.1 Swipe the tool in on the Card Swipe System.
6.1.2 Verify that the computer is on.
6.1.3 Make sure that the computer is on the Main Menu, if not select 0 Exit. Do not exit
from the Main Menu.
Unload Load
Reticle Changer
To Next Page
Loading...