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Chapter 6. MAINTENANCE AND TROUBLESHOOTING
● Maintaining the measurement module
Required items: Allen wrench (M5), Air blower, protective goggles, helmet,
gloves.
Handling Precautions
• For your safety, wear goggles while taking the measurement module
off.
(1) Release the air pressure from the MCF and pipes, and then make sure that the
gauge pressure is zero.
(2) Take the four bolts off by loosening them bit by bit in a diagonal pattern.
Handling Precautions
• Do not clean the measurement module path (bypass path) directly
with a blower or the like. Doing so can damage the sensor by blowing
foreign matter into it.
(3) After detaching the measurement module from the MCF, clean the surface
above the main path and the bypass inlet/outlet to the measurement module with
a blower. At this point, the rubber sheet and the built-in filter might still be
affixed to the main path. Before cleaning, take them off. After cleaning, reattach
the rubber sheet and filter to the main path. Also, remove the packing and clean
it.
(4) Make sure that the parts of measurement module are assembled correctly and
that the packing is in place in the main path, and then attach the measurement
module to the main path with the four bolts, matching the direction of the
arrows. Tighten the bolts evenly to the specified torque (2.6 to 3.3 N
•m).
(5) After the measurement module is attached, be sure that the displayed instanta-
neous flow rate is zero when the power is turned on.
(6) Supplying air pressure to the flowmeter and inside of the pipe, make sure that
the instantaneous flow rate shows zero when there is no flow.
(7) Be sure that the air does not leak.
Handling Precautions
• The measurement accuracy is ±5 %FS ±1 digit after the measurement
module is reattached.
● Replacing the measurement module on the MCF0250, MCF0400 and MCF0500
(1) The same as steps 1–3 in ● Maintaining the measurement module.
(2) Make sure that the parts of new measurement module are assembled correctly
and that the packing is in place in the main path, and then attach the measure-
ment module to the main path with the four bolts, matching the direction of the
arrows. Tighten the bolts evenly to the specified torque (2.6 to 3.3 N
•m).
(3) After the new measurement module is attached, input the flow path identifier
after the power is turned on.
(4) Be sure that the instantaneous flow rate shows zero.